JPS4947081A - - Google Patents
Info
- Publication number
- JPS4947081A JPS4947081A JP9149072A JP9149072A JPS4947081A JP S4947081 A JPS4947081 A JP S4947081A JP 9149072 A JP9149072 A JP 9149072A JP 9149072 A JP9149072 A JP 9149072A JP S4947081 A JPS4947081 A JP S4947081A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9149072A JPS5234192B2 (ru) | 1972-09-12 | 1972-09-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9149072A JPS5234192B2 (ru) | 1972-09-12 | 1972-09-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4947081A true JPS4947081A (ru) | 1974-05-07 |
| JPS5234192B2 JPS5234192B2 (ru) | 1977-09-01 |
Family
ID=14027846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9149072A Expired JPS5234192B2 (ru) | 1972-09-12 | 1972-09-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5234192B2 (ru) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5187971A (en) * | 1975-01-29 | 1976-07-31 | Ibm | Denjiimushoshanyoru rejisutozo no keiseihoho |
| JPS524833A (en) * | 1975-06-30 | 1977-01-14 | Agency Of Ind Science & Technol | Manufacturing method of electron-beam exposure resist use high molecul ar materials |
| JPS63165844A (ja) * | 1986-12-27 | 1988-07-09 | Terumo Corp | レジスト材料 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63159480U (ru) * | 1987-04-06 | 1988-10-19 | ||
| JPH09225056A (ja) * | 1996-02-21 | 1997-09-02 | Tomoki Yamazaki | 消火器 |
-
1972
- 1972-09-12 JP JP9149072A patent/JPS5234192B2/ja not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5187971A (en) * | 1975-01-29 | 1976-07-31 | Ibm | Denjiimushoshanyoru rejisutozo no keiseihoho |
| JPS5311827B2 (ru) * | 1975-01-29 | 1978-04-25 | ||
| JPS524833A (en) * | 1975-06-30 | 1977-01-14 | Agency Of Ind Science & Technol | Manufacturing method of electron-beam exposure resist use high molecul ar materials |
| JPS5533055B2 (ru) * | 1975-06-30 | 1980-08-28 | ||
| JPS63165844A (ja) * | 1986-12-27 | 1988-07-09 | Terumo Corp | レジスト材料 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5234192B2 (ru) | 1977-09-01 |