JPS4947081A - - Google Patents

Info

Publication number
JPS4947081A
JPS4947081A JP9149072A JP9149072A JPS4947081A JP S4947081 A JPS4947081 A JP S4947081A JP 9149072 A JP9149072 A JP 9149072A JP 9149072 A JP9149072 A JP 9149072A JP S4947081 A JPS4947081 A JP S4947081A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9149072A
Other languages
Japanese (ja)
Other versions
JPS5234192B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9149072A priority Critical patent/JPS5234192B2/ja
Publication of JPS4947081A publication Critical patent/JPS4947081A/ja
Publication of JPS5234192B2 publication Critical patent/JPS5234192B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP9149072A 1972-09-12 1972-09-12 Expired JPS5234192B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9149072A JPS5234192B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-09-12 1972-09-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9149072A JPS5234192B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-09-12 1972-09-12

Publications (2)

Publication Number Publication Date
JPS4947081A true JPS4947081A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-05-07
JPS5234192B2 JPS5234192B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-09-01

Family

ID=14027846

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9149072A Expired JPS5234192B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-09-12 1972-09-12

Country Status (1)

Country Link
JP (1) JPS5234192B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5187971A (en) * 1975-01-29 1976-07-31 Ibm Denjiimushoshanyoru rejisutozo no keiseihoho
JPS524833A (en) * 1975-06-30 1977-01-14 Agency Of Ind Science & Technol Manufacturing method of electron-beam exposure resist use high molecul ar materials
JPS63165844A (ja) * 1986-12-27 1988-07-09 Terumo Corp レジスト材料

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63159480U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1987-04-06 1988-10-19
JPH09225056A (ja) * 1996-02-21 1997-09-02 Tomoki Yamazaki 消火器

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5187971A (en) * 1975-01-29 1976-07-31 Ibm Denjiimushoshanyoru rejisutozo no keiseihoho
JPS524833A (en) * 1975-06-30 1977-01-14 Agency Of Ind Science & Technol Manufacturing method of electron-beam exposure resist use high molecul ar materials
JPS63165844A (ja) * 1986-12-27 1988-07-09 Terumo Corp レジスト材料

Also Published As

Publication number Publication date
JPS5234192B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-09-01

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