JPS494582B1 - - Google Patents

Info

Publication number
JPS494582B1
JPS494582B1 JP10371770A JP10371770A JPS494582B1 JP S494582 B1 JPS494582 B1 JP S494582B1 JP 10371770 A JP10371770 A JP 10371770A JP 10371770 A JP10371770 A JP 10371770A JP S494582 B1 JPS494582 B1 JP S494582B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10371770A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS494582B1 publication Critical patent/JPS494582B1/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/24—Deposition of silicon only
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP10371770A 1969-11-29 1970-11-26 Pending JPS494582B1 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6917985A NL6917985A (enrdf_load_stackoverflow) 1969-11-29 1969-11-29

Publications (1)

Publication Number Publication Date
JPS494582B1 true JPS494582B1 (enrdf_load_stackoverflow) 1974-02-01

Family

ID=19808511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10371770A Pending JPS494582B1 (enrdf_load_stackoverflow) 1969-11-29 1970-11-26

Country Status (8)

Country Link
JP (1) JPS494582B1 (enrdf_load_stackoverflow)
BE (1) BE759585A (enrdf_load_stackoverflow)
CH (1) CH563188A5 (enrdf_load_stackoverflow)
DE (1) DE2056160A1 (enrdf_load_stackoverflow)
FR (1) FR2072498A5 (enrdf_load_stackoverflow)
GB (1) GB1322347A (enrdf_load_stackoverflow)
NL (1) NL6917985A (enrdf_load_stackoverflow)
SE (1) SE355958B (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52135075U (enrdf_load_stackoverflow) * 1976-04-08 1977-10-14

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117467984B (zh) * 2023-11-08 2024-07-05 江苏首芯半导体科技有限公司 薄膜沉积装置及沉积方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52135075U (enrdf_load_stackoverflow) * 1976-04-08 1977-10-14

Also Published As

Publication number Publication date
CH563188A5 (enrdf_load_stackoverflow) 1975-06-30
GB1322347A (en) 1973-07-04
BE759585A (fr) 1971-05-27
NL6917985A (enrdf_load_stackoverflow) 1971-06-02
DE2056160A1 (de) 1971-06-03
SE355958B (enrdf_load_stackoverflow) 1973-05-14
FR2072498A5 (enrdf_load_stackoverflow) 1971-09-24

Similar Documents

Publication Publication Date Title
AU2270770A (enrdf_load_stackoverflow)
AU465452B2 (enrdf_load_stackoverflow)
AU429630B2 (enrdf_load_stackoverflow)
AU450150B2 (enrdf_load_stackoverflow)
AU442375B2 (enrdf_load_stackoverflow)
AU2355770A (enrdf_load_stackoverflow)
AU427401B2 (enrdf_load_stackoverflow)
AU470301B1 (enrdf_load_stackoverflow)
AU442463B2 (enrdf_load_stackoverflow)
AU414607B2 (enrdf_load_stackoverflow)
AU428074B2 (enrdf_load_stackoverflow)
AU428129B2 (enrdf_load_stackoverflow)
AU417208B2 (enrdf_load_stackoverflow)
AU470661B1 (enrdf_load_stackoverflow)
AU438128B2 (enrdf_load_stackoverflow)
AU425297B2 (enrdf_load_stackoverflow)
AU442285B2 (enrdf_load_stackoverflow)
AU442322B2 (enrdf_load_stackoverflow)
AU442357B2 (enrdf_load_stackoverflow)
AU410358B2 (enrdf_load_stackoverflow)
AU442380B2 (enrdf_load_stackoverflow)
AU442535B2 (enrdf_load_stackoverflow)
AU442554B2 (enrdf_load_stackoverflow)
AU442538B2 (enrdf_load_stackoverflow)
AU3858369A (enrdf_load_stackoverflow)