JPS4944674A - - Google Patents

Info

Publication number
JPS4944674A
JPS4944674A JP8760872A JP8760872A JPS4944674A JP S4944674 A JPS4944674 A JP S4944674A JP 8760872 A JP8760872 A JP 8760872A JP 8760872 A JP8760872 A JP 8760872A JP S4944674 A JPS4944674 A JP S4944674A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8760872A
Other languages
Japanese (ja)
Other versions
JPS523779B2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8760872A priority Critical patent/JPS523779B2/ja
Publication of JPS4944674A publication Critical patent/JPS4944674A/ja
Publication of JPS523779B2 publication Critical patent/JPS523779B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP8760872A 1972-08-31 1972-08-31 Expired JPS523779B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8760872A JPS523779B2 (cs) 1972-08-31 1972-08-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8760872A JPS523779B2 (cs) 1972-08-31 1972-08-31

Publications (2)

Publication Number Publication Date
JPS4944674A true JPS4944674A (cs) 1974-04-26
JPS523779B2 JPS523779B2 (cs) 1977-01-29

Family

ID=13919666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8760872A Expired JPS523779B2 (cs) 1972-08-31 1972-08-31

Country Status (1)

Country Link
JP (1) JPS523779B2 (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5242075A (en) * 1975-09-29 1977-04-01 Nippon Denso Co Ltd Device for controlling gas atmosphere in semiconductor producing equip ment
JPS58145117A (ja) * 1982-02-23 1983-08-29 Toshiba Corp 半導体製造装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5242075A (en) * 1975-09-29 1977-04-01 Nippon Denso Co Ltd Device for controlling gas atmosphere in semiconductor producing equip ment
JPS58145117A (ja) * 1982-02-23 1983-08-29 Toshiba Corp 半導体製造装置

Also Published As

Publication number Publication date
JPS523779B2 (cs) 1977-01-29

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