JPS523779B2 - - Google Patents
Info
- Publication number
- JPS523779B2 JPS523779B2 JP8760872A JP8760872A JPS523779B2 JP S523779 B2 JPS523779 B2 JP S523779B2 JP 8760872 A JP8760872 A JP 8760872A JP 8760872 A JP8760872 A JP 8760872A JP S523779 B2 JPS523779 B2 JP S523779B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8760872A JPS523779B2 (ja) | 1972-08-31 | 1972-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8760872A JPS523779B2 (ja) | 1972-08-31 | 1972-08-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4944674A JPS4944674A (ja) | 1974-04-26 |
| JPS523779B2 true JPS523779B2 (ja) | 1977-01-29 |
Family
ID=13919666
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8760872A Expired JPS523779B2 (ja) | 1972-08-31 | 1972-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS523779B2 (ja) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5242075A (en) * | 1975-09-29 | 1977-04-01 | Nippon Denso Co Ltd | Device for controlling gas atmosphere in semiconductor producing equip ment |
| JPS58145117A (ja) * | 1982-02-23 | 1983-08-29 | Toshiba Corp | 半導体製造装置 |
-
1972
- 1972-08-31 JP JP8760872A patent/JPS523779B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4944674A (ja) | 1974-04-26 |