JPS4943240A - - Google Patents

Info

Publication number
JPS4943240A
JPS4943240A JP48059227A JP5922773A JPS4943240A JP S4943240 A JPS4943240 A JP S4943240A JP 48059227 A JP48059227 A JP 48059227A JP 5922773 A JP5922773 A JP 5922773A JP S4943240 A JPS4943240 A JP S4943240A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48059227A
Other languages
Japanese (ja)
Other versions
JPS5318733B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4943240A publication Critical patent/JPS4943240A/ja
Publication of JPS5318733B2 publication Critical patent/JPS5318733B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Discharge Heating (AREA)
  • Physical Vapour Deposition (AREA)
JP5922773A 1972-05-26 1973-05-26 Expired JPS5318733B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US25742972A 1972-05-26 1972-05-26

Publications (2)

Publication Number Publication Date
JPS4943240A true JPS4943240A (en) 1974-04-23
JPS5318733B2 JPS5318733B2 (en) 1978-06-16

Family

ID=22976275

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5922773A Expired JPS5318733B2 (en) 1972-05-26 1973-05-26

Country Status (6)

Country Link
US (1) US3748365A (en)
JP (1) JPS5318733B2 (en)
CA (1) CA981758A (en)
DE (1) DE2325995A1 (en)
FR (1) FR2189977B1 (en)
GB (1) GB1381686A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4998700A (en) * 1973-01-25 1974-09-18

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4171462A (en) * 1977-05-19 1979-10-16 Jersey Nuclear-Avco Isotopes, Inc. Linear electron beam gun evaporator having uniform electron emission
BR112016029690A2 (en) 2014-07-07 2017-08-22 Honeywell Int Inc thermal interface material, and electronic component

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3068309A (en) * 1960-06-22 1962-12-11 Stauffer Chemical Co Electron beam furnace with multiple field guidance of electrons
NL287527A (en) * 1962-01-15
DE1439983A1 (en) * 1962-10-04 1969-03-13 Lokomotivbau Elektrotech Electron emitters, preferably for electron beam furnaces with very high powers
FR1482795A (en) * 1965-06-11 1967-05-26 Temescal Metallurgical Corp High vacuum apparatus with one or more electron beams, and method of controlling such apparatus
US3409729A (en) * 1966-12-16 1968-11-05 Air Reduction Electron beam furnace and method for heating a target therein
US3506871A (en) * 1967-05-29 1970-04-14 Air Reduction Electron beam gun having elongated tensioned emitter
US3701915A (en) * 1971-01-04 1972-10-31 Air Reduction Electron beam gun

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4998700A (en) * 1973-01-25 1974-09-18
JPS564951B2 (en) * 1973-01-25 1981-02-02

Also Published As

Publication number Publication date
JPS5318733B2 (en) 1978-06-16
GB1381686A (en) 1975-01-22
FR2189977B1 (en) 1978-06-30
US3748365A (en) 1973-07-24
CA981758A (en) 1976-01-13
FR2189977A1 (en) 1974-01-25
DE2325995A1 (en) 1973-12-06

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