FR1482795A - High vacuum apparatus with one or more electron beams, and method of controlling such apparatus - Google Patents
High vacuum apparatus with one or more electron beams, and method of controlling such apparatusInfo
- Publication number
- FR1482795A FR1482795A FR65013A FR65013A FR1482795A FR 1482795 A FR1482795 A FR 1482795A FR 65013 A FR65013 A FR 65013A FR 65013 A FR65013 A FR 65013A FR 1482795 A FR1482795 A FR 1482795A
- Authority
- FR
- France
- Prior art keywords
- controlling
- high vacuum
- electron beams
- vacuum apparatus
- beams
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR65013A FR1482795A (en) | 1965-06-11 | 1966-06-10 | High vacuum apparatus with one or more electron beams, and method of controlling such apparatus |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US463190A US3394217A (en) | 1965-06-11 | 1965-06-11 | Method and apparatus for controlling plural electron beams |
FR65013A FR1482795A (en) | 1965-06-11 | 1966-06-10 | High vacuum apparatus with one or more electron beams, and method of controlling such apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1482795A true FR1482795A (en) | 1967-05-26 |
Family
ID=26171245
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR65013A Expired FR1482795A (en) | 1965-06-11 | 1966-06-10 | High vacuum apparatus with one or more electron beams, and method of controlling such apparatus |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR1482795A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2189977A1 (en) * | 1972-05-26 | 1974-01-25 | Airco Inc |
-
1966
- 1966-06-10 FR FR65013A patent/FR1482795A/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2189977A1 (en) * | 1972-05-26 | 1974-01-25 | Airco Inc |
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