JPS4941716A - - Google Patents

Info

Publication number
JPS4941716A
JPS4941716A JP8574972A JP8574972A JPS4941716A JP S4941716 A JPS4941716 A JP S4941716A JP 8574972 A JP8574972 A JP 8574972A JP 8574972 A JP8574972 A JP 8574972A JP S4941716 A JPS4941716 A JP S4941716A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8574972A
Other languages
Japanese (ja)
Other versions
JPS5141161B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8574972A priority Critical patent/JPS5141161B2/ja
Publication of JPS4941716A publication Critical patent/JPS4941716A/ja
Publication of JPS5141161B2 publication Critical patent/JPS5141161B2/ja
Expired legal-status Critical Current

Links

JP8574972A 1972-08-25 1972-08-25 Expired JPS5141161B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8574972A JPS5141161B2 (en) 1972-08-25 1972-08-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8574972A JPS5141161B2 (en) 1972-08-25 1972-08-25

Publications (2)

Publication Number Publication Date
JPS4941716A true JPS4941716A (en) 1974-04-19
JPS5141161B2 JPS5141161B2 (en) 1976-11-08

Family

ID=13867487

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8574972A Expired JPS5141161B2 (en) 1972-08-25 1972-08-25

Country Status (1)

Country Link
JP (1) JPS5141161B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5169369A (en) * 1974-10-18 1976-06-15 Philips Nv
JPH06295898A (en) * 1993-02-24 1994-10-21 Advanced Chem Syst Internatl Inc Selective removal of organometallic compound, residue of organosilicic compound and damaged/oxide

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5169369A (en) * 1974-10-18 1976-06-15 Philips Nv
JPS5640492B2 (en) * 1974-10-18 1981-09-21
JPH06295898A (en) * 1993-02-24 1994-10-21 Advanced Chem Syst Internatl Inc Selective removal of organometallic compound, residue of organosilicic compound and damaged/oxide

Also Published As

Publication number Publication date
JPS5141161B2 (en) 1976-11-08

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