JPS5141161B2 - - Google Patents
Info
- Publication number
- JPS5141161B2 JPS5141161B2 JP8574972A JP8574972A JPS5141161B2 JP S5141161 B2 JPS5141161 B2 JP S5141161B2 JP 8574972 A JP8574972 A JP 8574972A JP 8574972 A JP8574972 A JP 8574972A JP S5141161 B2 JPS5141161 B2 JP S5141161B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8574972A JPS5141161B2 (en) | 1972-08-25 | 1972-08-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8574972A JPS5141161B2 (en) | 1972-08-25 | 1972-08-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4941716A JPS4941716A (en) | 1974-04-19 |
| JPS5141161B2 true JPS5141161B2 (en) | 1976-11-08 |
Family
ID=13867487
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8574972A Expired JPS5141161B2 (en) | 1972-08-25 | 1972-08-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5141161B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BR7506737A (en) * | 1974-10-18 | 1976-08-17 | Philips Nv | PROCESS FOR TREATING BODIES WITH AN ATTACK AGENT TO REMOVE ALUMINUM OXIDE AND PROCESS FOR MANUFACTURING SEMICONDUCTOR DEVICES |
| US5320709A (en) * | 1993-02-24 | 1994-06-14 | Advanced Chemical Systems International Incorporated | Method for selective removal of organometallic and organosilicon residues and damaged oxides using anhydrous ammonium fluoride solution |
-
1972
- 1972-08-25 JP JP8574972A patent/JPS5141161B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4941716A (en) | 1974-04-19 |