JPS4939421A - - Google Patents
Info
- Publication number
- JPS4939421A JPS4939421A JP47080907A JP8090772A JPS4939421A JP S4939421 A JPS4939421 A JP S4939421A JP 47080907 A JP47080907 A JP 47080907A JP 8090772 A JP8090772 A JP 8090772A JP S4939421 A JPS4939421 A JP S4939421A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrophotography Using Other Than Carlson'S Method (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8090772A JPS5441207B2 (de) | 1972-08-12 | 1972-08-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8090772A JPS5441207B2 (de) | 1972-08-12 | 1972-08-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4939421A true JPS4939421A (de) | 1974-04-12 |
| JPS5441207B2 JPS5441207B2 (de) | 1979-12-07 |
Family
ID=13731435
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8090772A Expired JPS5441207B2 (de) | 1972-08-12 | 1972-08-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5441207B2 (de) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5187971A (en) * | 1975-01-29 | 1976-07-31 | Ibm | Denjiimushoshanyoru rejisutozo no keiseihoho |
| JPS52153671A (en) * | 1976-06-16 | 1977-12-20 | Matsushita Electric Ind Co Ltd | Electron beam resist and its usage |
| JPS59192211A (ja) * | 1983-04-15 | 1984-10-31 | Olympus Optical Co Ltd | レンズ保持装置 |
| JPS60239704A (ja) * | 1984-05-14 | 1985-11-28 | Olympus Optical Co Ltd | 鏡組における光学素子の装入方法 |
-
1972
- 1972-08-12 JP JP8090772A patent/JPS5441207B2/ja not_active Expired
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5187971A (en) * | 1975-01-29 | 1976-07-31 | Ibm | Denjiimushoshanyoru rejisutozo no keiseihoho |
| JPS5311827B2 (de) * | 1975-01-29 | 1978-04-25 | ||
| JPS52153671A (en) * | 1976-06-16 | 1977-12-20 | Matsushita Electric Ind Co Ltd | Electron beam resist and its usage |
| JPS5934296B2 (ja) * | 1976-06-16 | 1984-08-21 | 松下電器産業株式会社 | 電子ビ−ムレジストおよびその使用方法 |
| JPS59192211A (ja) * | 1983-04-15 | 1984-10-31 | Olympus Optical Co Ltd | レンズ保持装置 |
| JPS60239704A (ja) * | 1984-05-14 | 1985-11-28 | Olympus Optical Co Ltd | 鏡組における光学素子の装入方法 |
| JPH0320725B2 (de) * | 1984-05-14 | 1991-03-20 | Olympus Optical Co |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5441207B2 (de) | 1979-12-07 |