JPS4937475A - - Google Patents

Info

Publication number
JPS4937475A
JPS4937475A JP47079501A JP7950172A JPS4937475A JP S4937475 A JPS4937475 A JP S4937475A JP 47079501 A JP47079501 A JP 47079501A JP 7950172 A JP7950172 A JP 7950172A JP S4937475 A JPS4937475 A JP S4937475A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47079501A
Other languages
Japanese (ja)
Other versions
JPS5116714B2 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47079501A priority Critical patent/JPS5116714B2/ja
Publication of JPS4937475A publication Critical patent/JPS4937475A/ja
Publication of JPS5116714B2 publication Critical patent/JPS5116714B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP47079501A 1972-08-10 1972-08-10 Expired JPS5116714B2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47079501A JPS5116714B2 (ko) 1972-08-10 1972-08-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47079501A JPS5116714B2 (ko) 1972-08-10 1972-08-10

Publications (2)

Publication Number Publication Date
JPS4937475A true JPS4937475A (ko) 1974-04-08
JPS5116714B2 JPS5116714B2 (ko) 1976-05-26

Family

ID=13691660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47079501A Expired JPS5116714B2 (ko) 1972-08-10 1972-08-10

Country Status (1)

Country Link
JP (1) JPS5116714B2 (ko)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5298280A (en) * 1976-02-16 1977-08-17 Shinsei Industries Co Device for removing chips from inside of tube
JPS56133379U (ko) * 1981-03-05 1981-10-09
JPS596457A (ja) * 1982-06-30 1984-01-13 Sankyo Seisakusho:Kk カム装置
JPS61204077A (ja) * 1985-03-05 1986-09-10 株式会社　ユニペツク 管外面の洗浄方法
JP2012164957A (ja) * 2011-01-18 2012-08-30 Tokyo Electron Ltd 液処理装置および液処理方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4529097Y1 (ko) * 1966-07-06 1970-11-09

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4529097Y1 (ko) * 1966-07-06 1970-11-09

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5298280A (en) * 1976-02-16 1977-08-17 Shinsei Industries Co Device for removing chips from inside of tube
JPS56133379U (ko) * 1981-03-05 1981-10-09
JPS596457A (ja) * 1982-06-30 1984-01-13 Sankyo Seisakusho:Kk カム装置
JPH022508B2 (ko) * 1982-06-30 1990-01-18 Sankyo Seisakusho Kk
JPS61204077A (ja) * 1985-03-05 1986-09-10 株式会社　ユニペツク 管外面の洗浄方法
JP2012164957A (ja) * 2011-01-18 2012-08-30 Tokyo Electron Ltd 液処理装置および液処理方法
US9190311B2 (en) 2011-01-18 2015-11-17 Tokyo Electron Limited Liquid arm cleaning unit for substrate processing apparatus

Also Published As

Publication number Publication date
JPS5116714B2 (ko) 1976-05-26

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