JPS4937475A - - Google Patents
Info
- Publication number
- JPS4937475A JPS4937475A JP47079501A JP7950172A JPS4937475A JP S4937475 A JPS4937475 A JP S4937475A JP 47079501 A JP47079501 A JP 47079501A JP 7950172 A JP7950172 A JP 7950172A JP S4937475 A JPS4937475 A JP S4937475A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47079501A JPS5116714B2 (https=) | 1972-08-10 | 1972-08-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47079501A JPS5116714B2 (https=) | 1972-08-10 | 1972-08-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4937475A true JPS4937475A (https=) | 1974-04-08 |
| JPS5116714B2 JPS5116714B2 (https=) | 1976-05-26 |
Family
ID=13691660
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47079501A Expired JPS5116714B2 (https=) | 1972-08-10 | 1972-08-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5116714B2 (https=) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5298280A (en) * | 1976-02-16 | 1977-08-17 | Shinsei Industries Co | Device for removing chips from inside of tube |
| JPS56133379U (https=) * | 1981-03-05 | 1981-10-09 | ||
| JPS596457A (ja) * | 1982-06-30 | 1984-01-13 | Sankyo Seisakusho:Kk | カム装置 |
| JPS61204077A (ja) * | 1985-03-05 | 1986-09-10 | 株式会社 ユニペツク | 管外面の洗浄方法 |
| JP2012164957A (ja) * | 2011-01-18 | 2012-08-30 | Tokyo Electron Ltd | 液処理装置および液処理方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4529097Y1 (https=) * | 1966-07-06 | 1970-11-09 |
-
1972
- 1972-08-10 JP JP47079501A patent/JPS5116714B2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4529097Y1 (https=) * | 1966-07-06 | 1970-11-09 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5298280A (en) * | 1976-02-16 | 1977-08-17 | Shinsei Industries Co | Device for removing chips from inside of tube |
| JPS56133379U (https=) * | 1981-03-05 | 1981-10-09 | ||
| JPS596457A (ja) * | 1982-06-30 | 1984-01-13 | Sankyo Seisakusho:Kk | カム装置 |
| JPS61204077A (ja) * | 1985-03-05 | 1986-09-10 | 株式会社 ユニペツク | 管外面の洗浄方法 |
| JP2012164957A (ja) * | 2011-01-18 | 2012-08-30 | Tokyo Electron Ltd | 液処理装置および液処理方法 |
| US9190311B2 (en) | 2011-01-18 | 2015-11-17 | Tokyo Electron Limited | Liquid arm cleaning unit for substrate processing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5116714B2 (https=) | 1976-05-26 |