JPS4937475A - - Google Patents

Info

Publication number
JPS4937475A
JPS4937475A JP47079501A JP7950172A JPS4937475A JP S4937475 A JPS4937475 A JP S4937475A JP 47079501 A JP47079501 A JP 47079501A JP 7950172 A JP7950172 A JP 7950172A JP S4937475 A JPS4937475 A JP S4937475A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47079501A
Other languages
Japanese (ja)
Other versions
JPS5116714B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47079501A priority Critical patent/JPS5116714B2/ja
Publication of JPS4937475A publication Critical patent/JPS4937475A/ja
Publication of JPS5116714B2 publication Critical patent/JPS5116714B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP47079501A 1972-08-10 1972-08-10 Expired JPS5116714B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47079501A JPS5116714B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-08-10 1972-08-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47079501A JPS5116714B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-08-10 1972-08-10

Publications (2)

Publication Number Publication Date
JPS4937475A true JPS4937475A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-04-08
JPS5116714B2 JPS5116714B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-05-26

Family

ID=13691660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47079501A Expired JPS5116714B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-08-10 1972-08-10

Country Status (1)

Country Link
JP (1) JPS5116714B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5298280A (en) * 1976-02-16 1977-08-17 Shinsei Industries Co Device for removing chips from inside of tube
JPS56133379U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1981-03-05 1981-10-09
JPS596457A (ja) * 1982-06-30 1984-01-13 Sankyo Seisakusho:Kk カム装置
JPS61204077A (ja) * 1985-03-05 1986-09-10 株式会社　ユニペツク 管外面の洗浄方法
JP2012164957A (ja) * 2011-01-18 2012-08-30 Tokyo Electron Ltd 液処理装置および液処理方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4529097Y1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1966-07-06 1970-11-09

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4529097Y1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1966-07-06 1970-11-09

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5298280A (en) * 1976-02-16 1977-08-17 Shinsei Industries Co Device for removing chips from inside of tube
JPS56133379U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1981-03-05 1981-10-09
JPS596457A (ja) * 1982-06-30 1984-01-13 Sankyo Seisakusho:Kk カム装置
JPS61204077A (ja) * 1985-03-05 1986-09-10 株式会社　ユニペツク 管外面の洗浄方法
JP2012164957A (ja) * 2011-01-18 2012-08-30 Tokyo Electron Ltd 液処理装置および液処理方法
US9190311B2 (en) 2011-01-18 2015-11-17 Tokyo Electron Limited Liquid arm cleaning unit for substrate processing apparatus

Also Published As

Publication number Publication date
JPS5116714B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-05-26

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