JPS4933890A - - Google Patents

Info

Publication number
JPS4933890A
JPS4933890A JP7631272A JP7631272A JPS4933890A JP S4933890 A JPS4933890 A JP S4933890A JP 7631272 A JP7631272 A JP 7631272A JP 7631272 A JP7631272 A JP 7631272A JP S4933890 A JPS4933890 A JP S4933890A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7631272A
Other languages
Japanese (ja)
Other versions
JPS549592B2 (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7631272A priority Critical patent/JPS549592B2/ja
Publication of JPS4933890A publication Critical patent/JPS4933890A/ja
Publication of JPS549592B2 publication Critical patent/JPS549592B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP7631272A 1972-07-29 1972-07-29 Expired JPS549592B2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7631272A JPS549592B2 (fr) 1972-07-29 1972-07-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7631272A JPS549592B2 (fr) 1972-07-29 1972-07-29

Publications (2)

Publication Number Publication Date
JPS4933890A true JPS4933890A (fr) 1974-03-28
JPS549592B2 JPS549592B2 (fr) 1979-04-25

Family

ID=13601841

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7631272A Expired JPS549592B2 (fr) 1972-07-29 1972-07-29

Country Status (1)

Country Link
JP (1) JPS549592B2 (fr)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50128688A (fr) * 1974-03-29 1975-10-09
JPS50149591A (fr) * 1974-05-22 1975-11-29
JPS5154143U (fr) * 1974-10-21 1976-04-24
JPS51101735A (ja) * 1975-03-06 1976-09-08 Sumitomo Bakelite Co Kinzokuhakumakuhifukunetsukasoseijushifuirumunoseizohoho
JPS51115287A (en) * 1975-04-03 1976-10-09 Matsushita Electric Ind Co Ltd Method of preparing compound film
JPS5210869A (en) * 1975-07-15 1977-01-27 Toshinori Takagi Thin film forming method
JPS52103978A (en) * 1976-02-25 1977-08-31 Sharp Corp Manufacture of conduction body in semiconductor device
JPS53114786A (en) * 1977-03-18 1978-10-06 Toko Inc Method of manufacturing zinc oxide thin film
JPS5533919U (fr) * 1978-08-23 1980-03-05
JPS55132535A (en) * 1979-04-02 1980-10-15 Sekisui Chem Co Ltd Manufacture of magnetic recording medium
JPS57195333A (en) * 1981-05-25 1982-12-01 Sekisui Chem Co Ltd Manufacture of magnetic recording medium
JPS60124918A (ja) * 1983-12-12 1985-07-04 Mitsubishi Electric Corp 薄膜蒸着装置
JPS6223103A (ja) * 1985-07-23 1987-01-31 Mitsubishi Electric Corp 薄膜付着装置
JP2008311231A (ja) * 2008-06-26 2008-12-25 Seiko Epson Corp 膜形成装置、電子装置の製造方法及び電気光学装置の製造方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0334162Y2 (fr) * 1985-11-11 1991-07-19
JP4485164B2 (ja) * 2003-09-26 2010-06-16 兼治 隅山 軟磁性材料の製造方法及び製造装置

Cited By (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5732105B2 (fr) * 1974-03-29 1982-07-08
JPS50128688A (fr) * 1974-03-29 1975-10-09
JPS50149591A (fr) * 1974-05-22 1975-11-29
JPS571586B2 (fr) * 1974-05-22 1982-01-12
JPS5154143U (fr) * 1974-10-21 1976-04-24
JPS5520743Y2 (fr) * 1974-10-21 1980-05-19
JPS51101735A (ja) * 1975-03-06 1976-09-08 Sumitomo Bakelite Co Kinzokuhakumakuhifukunetsukasoseijushifuirumunoseizohoho
JPS5743422B2 (fr) * 1975-03-06 1982-09-14
JPS51115287A (en) * 1975-04-03 1976-10-09 Matsushita Electric Ind Co Ltd Method of preparing compound film
JPS5210869A (en) * 1975-07-15 1977-01-27 Toshinori Takagi Thin film forming method
JPS52103978A (en) * 1976-02-25 1977-08-31 Sharp Corp Manufacture of conduction body in semiconductor device
JPS53114786A (en) * 1977-03-18 1978-10-06 Toko Inc Method of manufacturing zinc oxide thin film
JPS584920Y2 (ja) * 1978-08-23 1983-01-27 東光株式会社 酸化亜鉛薄膜の製造装置
JPS5533919U (fr) * 1978-08-23 1980-03-05
JPS55132535A (en) * 1979-04-02 1980-10-15 Sekisui Chem Co Ltd Manufacture of magnetic recording medium
JPS6131529B2 (fr) * 1979-04-02 1986-07-21 Sekisui Chemical Co Ltd
JPS57195333A (en) * 1981-05-25 1982-12-01 Sekisui Chem Co Ltd Manufacture of magnetic recording medium
JPS60124918A (ja) * 1983-12-12 1985-07-04 Mitsubishi Electric Corp 薄膜蒸着装置
JPH0351087B2 (fr) * 1983-12-12 1991-08-05 Mitsubishi Electric Corp
JPS6223103A (ja) * 1985-07-23 1987-01-31 Mitsubishi Electric Corp 薄膜付着装置
JPH0466378B2 (fr) * 1985-07-23 1992-10-23 Mitsubishi Electric Corp
JP2008311231A (ja) * 2008-06-26 2008-12-25 Seiko Epson Corp 膜形成装置、電子装置の製造方法及び電気光学装置の製造方法

Also Published As

Publication number Publication date
JPS549592B2 (fr) 1979-04-25

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