JPS4933209B1 - - Google Patents
Info
- Publication number
- JPS4933209B1 JPS4933209B1 JP38035088A JP3508863A JPS4933209B1 JP S4933209 B1 JPS4933209 B1 JP S4933209B1 JP 38035088 A JP38035088 A JP 38035088A JP 3508863 A JP3508863 A JP 3508863A JP S4933209 B1 JPS4933209 B1 JP S4933209B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US207681A US3150257A (en) | 1962-07-05 | 1962-07-05 | Electron beam aperture plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4933209B1 true JPS4933209B1 (de) | 1974-09-05 |
Family
ID=22771562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP38035088A Pending JPS4933209B1 (de) | 1962-07-05 | 1963-07-05 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US3150257A (de) |
| JP (1) | JPS4933209B1 (de) |
| BE (1) | BE634510A (de) |
| CH (1) | CH413147A (de) |
| DE (1) | DE1248182B (de) |
| FR (1) | FR1362285A (de) |
| GB (1) | GB1057684A (de) |
| NL (1) | NL294850A (de) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1299498B (de) * | 1964-07-24 | 1969-07-17 | Steigerwald Strahltech | Vorrichtung zur UEberwachung des Strahlauftreffbereichs in Korpuskularstrahl-Bearbeitungsgeraeten |
| DE2326279A1 (de) * | 1973-05-23 | 1974-12-19 | Siemens Ag | Ionenstrahlschnellschaltung zur erzielung definierter festkoerperdotierungen durch ionenimplantation |
| FR2321976A1 (fr) * | 1975-08-26 | 1977-03-25 | Commissariat Energie Atomique | Vanne d'isolement pour machine de soudage par bombardement electronique et machines munies d'une telle vanne |
| US4445041A (en) * | 1981-06-02 | 1984-04-24 | Hewlett-Packard Company | Electron beam blanker |
| CN105247660B (zh) * | 2013-03-15 | 2018-06-12 | 格伦·莱恩家族有限责任有限合伙企业 | 可调节的质量分辨孔 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2877353A (en) * | 1954-07-14 | 1959-03-10 | Gen Electric | X-ray microscope |
| DE1850497U (de) * | 1958-05-21 | 1962-04-26 | Akashi Seisakusho | Vorrichtung zum reinigen der blende von elektronen-mikroskopen bzw. elektronen-beugungsgeraeten. |
| US3038993A (en) * | 1958-05-21 | 1962-06-12 | Masuda Tatsunosuke | Aperture system for electron optical instrument |
-
0
- NL NL294850D patent/NL294850A/xx unknown
- BE BE634510D patent/BE634510A/xx unknown
-
1962
- 1962-07-05 US US207681A patent/US3150257A/en not_active Expired - Lifetime
-
1963
- 1963-07-03 CH CH823063A patent/CH413147A/de unknown
- 1963-07-04 DE DEP32134A patent/DE1248182B/de not_active Withdrawn
- 1963-07-05 JP JP38035088A patent/JPS4933209B1/ja active Pending
- 1963-07-05 FR FR940485A patent/FR1362285A/fr not_active Expired
- 1963-07-05 GB GB26757/63D patent/GB1057684A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE1248182B (de) | 1967-08-24 |
| US3150257A (en) | 1964-09-22 |
| FR1362285A (fr) | 1964-05-29 |
| NL294850A (de) | |
| CH413147A (de) | 1966-05-15 |
| GB1057684A (en) | 1967-02-08 |
| BE634510A (de) |