JPS4932827A - - Google Patents

Info

Publication number
JPS4932827A
JPS4932827A JP7455172A JP7455172A JPS4932827A JP S4932827 A JPS4932827 A JP S4932827A JP 7455172 A JP7455172 A JP 7455172A JP 7455172 A JP7455172 A JP 7455172A JP S4932827 A JPS4932827 A JP S4932827A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7455172A
Other languages
Japanese (ja)
Other versions
JPS533733B2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7455172A priority Critical patent/JPS533733B2/ja
Publication of JPS4932827A publication Critical patent/JPS4932827A/ja
Publication of JPS533733B2 publication Critical patent/JPS533733B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP7455172A 1972-07-27 1972-07-27 Expired JPS533733B2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7455172A JPS533733B2 (https=) 1972-07-27 1972-07-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7455172A JPS533733B2 (https=) 1972-07-27 1972-07-27

Publications (2)

Publication Number Publication Date
JPS4932827A true JPS4932827A (https=) 1974-03-26
JPS533733B2 JPS533733B2 (https=) 1978-02-09

Family

ID=13550480

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7455172A Expired JPS533733B2 (https=) 1972-07-27 1972-07-27

Country Status (1)

Country Link
JP (1) JPS533733B2 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51137682A (en) * 1975-05-23 1976-11-27 Hitachi Ltd Gas phase ch emical reaction system
JPH07276176A (ja) * 1994-04-11 1995-10-24 Daiei Seisakusho:Kk シャフト類通過装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5468074U (https=) * 1977-10-24 1979-05-15
JP6681980B2 (ja) 2017-04-28 2020-04-15 三菱電機株式会社 冷凍サイクル装置及びこの冷凍サイクル装置を備えた電気機器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51137682A (en) * 1975-05-23 1976-11-27 Hitachi Ltd Gas phase ch emical reaction system
JPH07276176A (ja) * 1994-04-11 1995-10-24 Daiei Seisakusho:Kk シャフト類通過装置

Also Published As

Publication number Publication date
JPS533733B2 (https=) 1978-02-09

Similar Documents

Publication Publication Date Title
CS161815B2 (https=)
JPS4989381A (https=)
JPS5653513B2 (https=)
CS172983B2 (https=)
FR2180671B1 (https=)
FR2192147A1 (https=)
JPS4932827A (https=)
CS166174B2 (https=)
JPS4925472U (https=)
JPS521336Y2 (https=)
JPS5236422B2 (https=)
JPS5012926Y2 (https=)
JPS4929692A (https=)
JPS4919398U (https=)
CS177118B2 (https=)
JPS5234142Y2 (https=)
JPS5329030Y2 (https=)
CS166330B1 (https=)
CS158009B1 (https=)
JPS4959681A (https=)
JPS4985700U (https=)
JPS4989801A (https=)
CS166336B1 (https=)
CS156348B1 (https=)
JPS4990019U (https=)