JPS4932827A - - Google Patents

Info

Publication number
JPS4932827A
JPS4932827A JP7455172A JP7455172A JPS4932827A JP S4932827 A JPS4932827 A JP S4932827A JP 7455172 A JP7455172 A JP 7455172A JP 7455172 A JP7455172 A JP 7455172A JP S4932827 A JPS4932827 A JP S4932827A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7455172A
Other languages
Japanese (ja)
Other versions
JPS533733B2 (US20090163788A1-20090625-C00002.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7455172A priority Critical patent/JPS533733B2/ja
Publication of JPS4932827A publication Critical patent/JPS4932827A/ja
Publication of JPS533733B2 publication Critical patent/JPS533733B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP7455172A 1972-07-27 1972-07-27 Expired JPS533733B2 (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7455172A JPS533733B2 (US20090163788A1-20090625-C00002.png) 1972-07-27 1972-07-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7455172A JPS533733B2 (US20090163788A1-20090625-C00002.png) 1972-07-27 1972-07-27

Publications (2)

Publication Number Publication Date
JPS4932827A true JPS4932827A (US20090163788A1-20090625-C00002.png) 1974-03-26
JPS533733B2 JPS533733B2 (US20090163788A1-20090625-C00002.png) 1978-02-09

Family

ID=13550480

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7455172A Expired JPS533733B2 (US20090163788A1-20090625-C00002.png) 1972-07-27 1972-07-27

Country Status (1)

Country Link
JP (1) JPS533733B2 (US20090163788A1-20090625-C00002.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51137682A (en) * 1975-05-23 1976-11-27 Hitachi Ltd Gas phase ch emical reaction system
JPH07276176A (ja) * 1994-04-11 1995-10-24 Daiei Seisakusho:Kk シャフト類通過装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5468074U (US20090163788A1-20090625-C00002.png) * 1977-10-24 1979-05-15
JPS612210Y2 (US20090163788A1-20090625-C00002.png) * 1981-01-09 1986-01-24
JP6681980B2 (ja) 2017-04-28 2020-04-15 三菱電機株式会社 冷凍サイクル装置及びこの冷凍サイクル装置を備えた電気機器

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51137682A (en) * 1975-05-23 1976-11-27 Hitachi Ltd Gas phase ch emical reaction system
JPS5810988B2 (ja) * 1975-05-23 1983-02-28 株式会社日立製作所 キソウカガクハンノウホウシキ
JPH07276176A (ja) * 1994-04-11 1995-10-24 Daiei Seisakusho:Kk シャフト類通過装置

Also Published As

Publication number Publication date
JPS533733B2 (US20090163788A1-20090625-C00002.png) 1978-02-09

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