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Priority to JP6726472ApriorityCriticalpatent/JPS5439562B2/ja
Publication of JPS4926706ApublicationCriticalpatent/JPS4926706A/ja
Publication of JPS5439562B2publicationCriticalpatent/JPS5439562B2/ja
Unite d'excitation, moteur lineaire ou plan utilisant l'unite, dispositif a etage utilisant le moteur et dispositif d'alignement utilisant le dispositif
Unite d'excitation, moteur lineaire ou plan utilisant l'unite, dispositif a etage utilisant le moteur et dispositif d'alignement utilisant le dispositif