JPS4917166A - - Google Patents

Info

Publication number
JPS4917166A
JPS4917166A JP47050587A JP5058772A JPS4917166A JP S4917166 A JPS4917166 A JP S4917166A JP 47050587 A JP47050587 A JP 47050587A JP 5058772 A JP5058772 A JP 5058772A JP S4917166 A JPS4917166 A JP S4917166A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47050587A
Other languages
Japanese (ja)
Other versions
JPS5433512B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5058772A priority Critical patent/JPS5433512B2/ja
Priority to GB2093373A priority patent/GB1363618A/en
Priority to US00361180A priority patent/US3857055A/en
Priority to FR7318387A priority patent/FR2185854B1/fr
Priority to DE2325993A priority patent/DE2325993C3/de
Publication of JPS4917166A publication Critical patent/JPS4917166A/ja
Publication of JPS5433512B2 publication Critical patent/JPS5433512B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP5058772A 1972-05-22 1972-05-22 Expired JPS5433512B2 (enrdf_load_stackoverflow)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP5058772A JPS5433512B2 (enrdf_load_stackoverflow) 1972-05-22 1972-05-22
GB2093373A GB1363618A (en) 1972-05-22 1973-05-02 Electron gun
US00361180A US3857055A (en) 1972-05-22 1973-05-17 Electron gun for electron irradiation equipment
FR7318387A FR2185854B1 (enrdf_load_stackoverflow) 1972-05-22 1973-05-21
DE2325993A DE2325993C3 (de) 1972-05-22 1973-05-22 Elektronenkanone

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5058772A JPS5433512B2 (enrdf_load_stackoverflow) 1972-05-22 1972-05-22

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP3363979A Division JPS551077A (en) 1979-03-22 1979-03-22 Electron gun for electron irradiator

Publications (2)

Publication Number Publication Date
JPS4917166A true JPS4917166A (enrdf_load_stackoverflow) 1974-02-15
JPS5433512B2 JPS5433512B2 (enrdf_load_stackoverflow) 1979-10-20

Family

ID=12863092

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5058772A Expired JPS5433512B2 (enrdf_load_stackoverflow) 1972-05-22 1972-05-22

Country Status (5)

Country Link
US (1) US3857055A (enrdf_load_stackoverflow)
JP (1) JPS5433512B2 (enrdf_load_stackoverflow)
DE (1) DE2325993C3 (enrdf_load_stackoverflow)
FR (1) FR2185854B1 (enrdf_load_stackoverflow)
GB (1) GB1363618A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS528595A (en) * 1975-07-09 1977-01-22 Matsushita Electric Ind Co Ltd Electron gun for electronic beam processing machines
JPS52154150U (enrdf_load_stackoverflow) * 1976-05-19 1977-11-22
JPS5747063A (en) * 1980-05-31 1982-03-17 Biieru Tekunorojii Ltd Speed change machine
JPS60227046A (ja) * 1983-12-02 1985-11-12 レイランド　ビ−クルズ　リミテツド 連続可変変速比伝動装置
JPH04502593A (ja) * 1989-01-06 1992-05-14 トロトラック・（ディベロップメント）・リミテッド 車輪自動車用の動力伝達系統に関する改良
JP2022066532A (ja) * 2017-04-11 2022-04-28 エーエスエムエル ネザーランズ ビー．ブイ． 荷電粒子源モジュール

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE59010590D1 (de) * 1989-09-09 1997-01-16 Ptr Praezisionstech Gmbh Katodenhalter für einen Elektronenstrahlerzeuger
DE3930202A1 (de) * 1989-09-09 1991-03-14 Ptr Praezisionstech Gmbh Elektronenstrahlerzeuger fuer eine elektronenstrahlkanone
US5376792A (en) * 1993-04-26 1994-12-27 Rj Lee Group, Inc. Scanning electron microscope
BR112012025675A2 (pt) * 2010-04-09 2016-07-05 Ge Sensing & Inspection Tech elemento de catálogo para um tubo de raios-x microfoco
US10807187B2 (en) * 2015-09-24 2020-10-20 Arcam Ab X-ray calibration standard object
KR102120946B1 (ko) * 2018-11-16 2020-06-10 (주)엠크래프츠 전자빔 자동정렬구조가 구비된 전자현미경
CN110556279A (zh) * 2019-08-13 2019-12-10 河南河大科技发展有限公司 一种阴极电子枪灯丝装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2639397A (en) * 1949-06-04 1953-05-19 Collins Radio Co Vacuum gauge of the ionization producing type
US2932755A (en) * 1956-01-30 1960-04-12 Applied Radiation Corp Electron gun and cathode
US3187216A (en) * 1961-05-12 1965-06-01 Welding Research Inc Electron gun having a releasably clamped electron emitting element
US3263109A (en) * 1961-07-24 1966-07-26 Siemens Ag Electron source for corpuscular radiation apparatus operating on a pump including an indirectly heated cathode
US3368163A (en) * 1964-05-28 1968-02-06 Sylvania Electric Prod Ruggedized high frequency apparatus
US3358174A (en) * 1964-12-18 1967-12-12 Gen Electric Electron gun having a segmented control electrode
CH491495A (de) * 1968-05-15 1970-05-31 Eidophor Ag Kathodenstrahlerzeugungssystem mit auswechselbarer Kathode
US3601651A (en) * 1970-01-09 1971-08-24 Motorola Inc Replacement cathode assembly

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS528595A (en) * 1975-07-09 1977-01-22 Matsushita Electric Ind Co Ltd Electron gun for electronic beam processing machines
JPS52154150U (enrdf_load_stackoverflow) * 1976-05-19 1977-11-22
JPS5747063A (en) * 1980-05-31 1982-03-17 Biieru Tekunorojii Ltd Speed change machine
JPS60227046A (ja) * 1983-12-02 1985-11-12 レイランド　ビ−クルズ　リミテツド 連続可変変速比伝動装置
JPH04502593A (ja) * 1989-01-06 1992-05-14 トロトラック・（ディベロップメント）・リミテッド 車輪自動車用の動力伝達系統に関する改良
JP2022066532A (ja) * 2017-04-11 2022-04-28 エーエスエムエル ネザーランズ ビー．ブイ． 荷電粒子源モジュール
US12288663B2 (en) 2017-04-11 2025-04-29 Asml Netherlands B.V. Charged particle source module

Also Published As

Publication number Publication date
GB1363618A (en) 1974-08-14
JPS5433512B2 (enrdf_load_stackoverflow) 1979-10-20
DE2325993A1 (de) 1973-12-06
DE2325993C3 (de) 1981-10-15
FR2185854B1 (enrdf_load_stackoverflow) 1977-02-18
FR2185854A1 (enrdf_load_stackoverflow) 1974-01-04
DE2325993B2 (de) 1975-04-24
US3857055A (en) 1974-12-24

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