JPS4913232A - - Google Patents

Info

Publication number
JPS4913232A
JPS4913232A JP48030167A JP3016773A JPS4913232A JP S4913232 A JPS4913232 A JP S4913232A JP 48030167 A JP48030167 A JP 48030167A JP 3016773 A JP3016773 A JP 3016773A JP S4913232 A JPS4913232 A JP S4913232A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48030167A
Other languages
Japanese (ja)
Other versions
JPS536755B2 (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4913232A publication Critical patent/JPS4913232A/ja
Publication of JPS536755B2 publication Critical patent/JPS536755B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002—Preparing wafers
    • H01L21/02005—Preparing bulk and homogeneous wafers
    • H01L21/02008—Multistep processes
    • H01L21/0201—Specific process step
    • H01L21/02024—Mirror polishing
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Paints Or Removers (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP3016773A 1972-03-17 1973-03-16 Expired JPS536755B2 (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00235651A US3817727A (en) 1972-03-17 1972-03-17 Abrasive polishing suspensions and method for making same

Publications (2)

Publication Number Publication Date
JPS4913232A true JPS4913232A (zh) 1974-02-05
JPS536755B2 JPS536755B2 (zh) 1978-03-10

Family

ID=22886391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3016773A Expired JPS536755B2 (zh) 1972-03-17 1973-03-16

Country Status (4)

Country Link
US (1) US3817727A (zh)
JP (1) JPS536755B2 (zh)
CA (1) CA972167A (zh)
FR (1) FR2176798B1 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50144989A (zh) * 1974-05-13 1975-11-21
JPS5131793A (ja) * 1974-09-13 1976-03-18 Hitachi Chemical Co Ltd Yuyoseifuenooruhokozokuhorumuarudehitojushi no seiho

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4038048A (en) * 1975-02-14 1977-07-26 Thrower Jr Herbert T Lapping composition containing a carboxy vinyl polymer
FR2414071A1 (fr) * 1978-01-05 1979-08-03 Essilor Int Materiau de polissage, notamment pour lentille ophtalmique en matiere organique
US4260396A (en) * 1978-01-16 1981-04-07 W. R. Grace & Co. Compositions for polishing silicon and germanium
US4242842A (en) * 1979-08-08 1981-01-06 La Pierre Synthetique Baikowski, S.A. Precision polishing suspension and method for making same
US4358295A (en) * 1980-03-27 1982-11-09 Matsushita Electric Industrial Co., Ltd. Polishing method
RU2034889C1 (ru) * 1993-04-02 1995-05-10 Научно-производственное объединение "Алтай" Композиция для суперфинишной доводки поверхности материала
WO1996016436A1 (en) * 1994-11-18 1996-05-30 Advanced Micro Devices, Inc. Method of making a chemical-mechanical polishing slurry and the polishing slurry
DE19642908A1 (de) * 1996-10-17 1998-04-23 Wacker Siltronic Halbleitermat Sägesuspension und Verfahren zum Abtrennen von Scheiben von einem Kristall
US5916855A (en) * 1997-03-26 1999-06-29 Advanced Micro Devices, Inc. Chemical-mechanical polishing slurry formulation and method for tungsten and titanium thin films
US5855633A (en) * 1997-06-06 1999-01-05 Lockheed Martin Energy Systems, Inc. Lapping slurry
US7332457B2 (en) * 2000-09-18 2008-02-19 Honeywell International Inc. Agricultural chemical suspensions
CN113718328B (zh) * 2021-11-04 2022-02-11 山东裕航特种合金装备有限公司 一种船用铝合金铸件的表面处理方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2783137A (en) * 1951-06-08 1957-02-26 Dow Chemical Co Grinding compositions and making of same
US3053646A (en) * 1960-07-15 1962-09-11 Dow Chemical Co Grinding and polishing compositions and method of making same
NL263408A (zh) * 1962-04-10

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50144989A (zh) * 1974-05-13 1975-11-21
JPS5131793A (ja) * 1974-09-13 1976-03-18 Hitachi Chemical Co Ltd Yuyoseifuenooruhokozokuhorumuarudehitojushi no seiho

Also Published As

Publication number Publication date
JPS536755B2 (zh) 1978-03-10
DE2312372B2 (de) 1976-02-12
FR2176798A1 (zh) 1973-11-02
FR2176798B1 (zh) 1976-05-21
CA972167A (en) 1975-08-05
DE2312372A1 (de) 1973-09-20
US3817727A (en) 1974-06-18

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