JPS49124781A - - Google Patents
Info
- Publication number
- JPS49124781A JPS49124781A JP3546873A JP3546873A JPS49124781A JP S49124781 A JPS49124781 A JP S49124781A JP 3546873 A JP3546873 A JP 3546873A JP 3546873 A JP3546873 A JP 3546873A JP S49124781 A JPS49124781 A JP S49124781A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3546873A JPS49124781A (enrdf_load_stackoverflow) | 1973-03-28 | 1973-03-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3546873A JPS49124781A (enrdf_load_stackoverflow) | 1973-03-28 | 1973-03-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS49124781A true JPS49124781A (enrdf_load_stackoverflow) | 1974-11-29 |
Family
ID=12442600
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3546873A Pending JPS49124781A (enrdf_load_stackoverflow) | 1973-03-28 | 1973-03-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS49124781A (enrdf_load_stackoverflow) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5680393U (enrdf_load_stackoverflow) * | 1979-11-20 | 1981-06-29 | ||
| JPS58109398A (ja) * | 1981-12-21 | 1983-06-29 | 小松フオ−クリフト株式会社 | フオ−クリフトトラツク |
| JPH0188607U (enrdf_load_stackoverflow) * | 1987-12-05 | 1989-06-12 | ||
| JPH0543014A (ja) * | 1991-08-08 | 1993-02-23 | Eikou Seisakusho:Kk | ラツク設備 |
| JP2011187796A (ja) * | 2010-03-10 | 2011-09-22 | Sokudo Co Ltd | 基板処理装置、ストッカー装置および基板収納容器の搬送方法 |
| JP2013157650A (ja) * | 2013-05-23 | 2013-08-15 | Sokudo Co Ltd | 基板処理装置、ストッカー装置および基板収納容器の搬送方法 |
-
1973
- 1973-03-28 JP JP3546873A patent/JPS49124781A/ja active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5680393U (enrdf_load_stackoverflow) * | 1979-11-20 | 1981-06-29 | ||
| JPS58109398A (ja) * | 1981-12-21 | 1983-06-29 | 小松フオ−クリフト株式会社 | フオ−クリフトトラツク |
| JPH0188607U (enrdf_load_stackoverflow) * | 1987-12-05 | 1989-06-12 | ||
| JPH0543014A (ja) * | 1991-08-08 | 1993-02-23 | Eikou Seisakusho:Kk | ラツク設備 |
| JP2011187796A (ja) * | 2010-03-10 | 2011-09-22 | Sokudo Co Ltd | 基板処理装置、ストッカー装置および基板収納容器の搬送方法 |
| US8827621B2 (en) | 2010-03-10 | 2014-09-09 | Sokudo Co., Ltd. | Substrate processing apparatus, storage device, and method of transporting substrate storing container |
| US9728434B2 (en) | 2010-03-10 | 2017-08-08 | Screen Semiconductor Solutions Co., Ltd. | Substrate processing apparatus, storage device, and method of transporting substrate storing container |
| JP2013157650A (ja) * | 2013-05-23 | 2013-08-15 | Sokudo Co Ltd | 基板処理装置、ストッカー装置および基板収納容器の搬送方法 |