JPS4912269B1 - - Google Patents
Info
- Publication number
- JPS4912269B1 JPS4912269B1 JP2683869A JP2683869A JPS4912269B1 JP S4912269 B1 JPS4912269 B1 JP S4912269B1 JP 2683869 A JP2683869 A JP 2683869A JP 2683869 A JP2683869 A JP 2683869A JP S4912269 B1 JPS4912269 B1 JP S4912269B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/1478—Beam tilting means, i.e. for stereoscopy or for beam channelling
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2683869A JPS4912269B1 (ja) | 1969-04-09 | 1969-04-09 | |
| GB1640570A GB1300624A (en) | 1969-04-09 | 1970-04-07 | Charged particle beam apparatus having means to observe a stereo-image of a specimen |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2683869A JPS4912269B1 (ja) | 1969-04-09 | 1969-04-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4912269B1 true JPS4912269B1 (ja) | 1974-03-23 |
Family
ID=12204393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2683869A Pending JPS4912269B1 (ja) | 1969-04-09 | 1969-04-09 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS4912269B1 (ja) |
| GB (1) | GB1300624A (ja) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU839412A1 (ru) * | 1979-06-04 | 1983-02-07 | Предприятие П/Я М-5912 | Электроннооптическа система |
| GB2236015B (en) * | 1986-09-24 | 1991-06-19 | Breton Bernard C | Improvements in and relating to charged particle beam scanning apparatus |
| GB8622976D0 (en) * | 1986-09-24 | 1986-10-29 | Trialsite Ltd | Scanning electron microscopes |
| JPH0233843A (ja) * | 1988-07-25 | 1990-02-05 | Hitachi Ltd | 走査電子顕微鏡 |
| US6614026B1 (en) | 1999-04-15 | 2003-09-02 | Applied Materials, Inc. | Charged particle beam column |
| US6452175B1 (en) * | 1999-04-15 | 2002-09-17 | Applied Materials, Inc. | Column for charged particle beam device |
-
1969
- 1969-04-09 JP JP2683869A patent/JPS4912269B1/ja active Pending
-
1970
- 1970-04-07 GB GB1640570A patent/GB1300624A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1300624A (en) | 1972-12-20 |