JPS49114381A - - Google Patents
Info
- Publication number
- JPS49114381A JPS49114381A JP49011567A JP1156774A JPS49114381A JP S49114381 A JPS49114381 A JP S49114381A JP 49011567 A JP49011567 A JP 49011567A JP 1156774 A JP1156774 A JP 1156774A JP S49114381 A JPS49114381 A JP S49114381A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/01—Manufacture or treatment
- H10W20/071—Manufacture or treatment of dielectric parts thereof
- H10W20/074—Manufacture or treatment of dielectric parts thereof of dielectric parts comprising thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
- H10W20/077—Manufacture or treatment of dielectric parts thereof of dielectric parts comprising thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers on sidewalls or on top surfaces of conductors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/01—Manufacture or treatment
- H10W20/071—Manufacture or treatment of dielectric parts thereof
- H10W20/074—Manufacture or treatment of dielectric parts thereof of dielectric parts comprising thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US33151173A | 1973-02-12 | 1973-02-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS49114381A true JPS49114381A (enExample) | 1974-10-31 |
Family
ID=23294273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49011567A Pending JPS49114381A (enExample) | 1973-02-12 | 1974-01-29 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS49114381A (enExample) |
| CA (1) | CA1004779A (enExample) |
| DE (1) | DE2406578A1 (enExample) |
| GB (1) | GB1419906A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2137808A (en) * | 1983-04-06 | 1984-10-10 | Plessey Co Plc | Integrated circuit processing method |
-
1974
- 1974-01-29 JP JP49011567A patent/JPS49114381A/ja active Pending
- 1974-02-04 GB GB499574A patent/GB1419906A/en not_active Expired
- 1974-02-07 CA CA192,009A patent/CA1004779A/en not_active Expired
- 1974-02-12 DE DE19742406578 patent/DE2406578A1/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE2406578A1 (de) | 1974-08-15 |
| GB1419906A (en) | 1975-12-31 |
| CA1004779A (en) | 1977-02-01 |