JPS4911073A - - Google Patents

Info

Publication number
JPS4911073A
JPS4911073A JP5164972A JP5164972A JPS4911073A JP S4911073 A JPS4911073 A JP S4911073A JP 5164972 A JP5164972 A JP 5164972A JP 5164972 A JP5164972 A JP 5164972A JP S4911073 A JPS4911073 A JP S4911073A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5164972A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5164972A priority Critical patent/JPS4911073A/ja
Publication of JPS4911073A publication Critical patent/JPS4911073A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Feeding Of Workpieces (AREA)
JP5164972A 1972-05-26 1972-05-26 Pending JPS4911073A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5164972A JPS4911073A (zh) 1972-05-26 1972-05-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5164972A JPS4911073A (zh) 1972-05-26 1972-05-26

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP6897780A Division JPS55163858A (en) 1980-05-26 1980-05-26 Device for positioning pellet

Publications (1)

Publication Number Publication Date
JPS4911073A true JPS4911073A (zh) 1974-01-31

Family

ID=12892696

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5164972A Pending JPS4911073A (zh) 1972-05-26 1972-05-26

Country Status (1)

Country Link
JP (1) JPS4911073A (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5619032U (zh) * 1979-07-20 1981-02-19
JP2016072305A (ja) * 2014-09-26 2016-05-09 富士電機株式会社 半導体装置の製造装置及び半導体装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS443578Y1 (zh) * 1966-06-18 1969-02-08
JPS4828961A (zh) * 1971-08-20 1973-04-17

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS443578Y1 (zh) * 1966-06-18 1969-02-08
JPS4828961A (zh) * 1971-08-20 1973-04-17

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5619032U (zh) * 1979-07-20 1981-02-19
JPS6221010Y2 (zh) * 1979-07-20 1987-05-28
JP2016072305A (ja) * 2014-09-26 2016-05-09 富士電機株式会社 半導体装置の製造装置及び半導体装置

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