JPS443578Y1 - - Google Patents

Info

Publication number
JPS443578Y1
JPS443578Y1 JP5776166U JP5776166U JPS443578Y1 JP S443578 Y1 JPS443578 Y1 JP S443578Y1 JP 5776166 U JP5776166 U JP 5776166U JP 5776166 U JP5776166 U JP 5776166U JP S443578 Y1 JPS443578 Y1 JP S443578Y1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5776166U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5776166U priority Critical patent/JPS443578Y1/ja
Publication of JPS443578Y1 publication Critical patent/JPS443578Y1/ja
Expired legal-status Critical Current

Links

JP5776166U 1966-06-18 1966-06-18 Expired JPS443578Y1 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5776166U JPS443578Y1 (zh) 1966-06-18 1966-06-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5776166U JPS443578Y1 (zh) 1966-06-18 1966-06-18

Publications (1)

Publication Number Publication Date
JPS443578Y1 true JPS443578Y1 (zh) 1969-02-08

Family

ID=31791469

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5776166U Expired JPS443578Y1 (zh) 1966-06-18 1966-06-18

Country Status (1)

Country Link
JP (1) JPS443578Y1 (zh)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4911073A (zh) * 1972-05-26 1974-01-31
JPS4917676A (zh) * 1972-06-05 1974-02-16
JPS4929075A (zh) * 1972-07-12 1974-03-15
JPS556889A (en) * 1979-06-20 1980-01-18 Hitachi Ltd Positioning device of pellet
JPS55118690A (en) * 1979-03-05 1980-09-11 Matsushita Electric Ind Co Ltd Device for carrying electronic part
JPS565106A (en) * 1979-06-11 1981-01-20 Shell Int Research Method and device for removing acidic component
JPS592135U (ja) * 1982-06-28 1984-01-09 株式会社東芝 ウエハ回転装置

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4911073A (zh) * 1972-05-26 1974-01-31
JPS4917676A (zh) * 1972-06-05 1974-02-16
JPS4929075A (zh) * 1972-07-12 1974-03-15
JPS5622139B2 (zh) * 1972-07-12 1981-05-23
JPS55118690A (en) * 1979-03-05 1980-09-11 Matsushita Electric Ind Co Ltd Device for carrying electronic part
JPS639400B2 (zh) * 1979-03-05 1988-02-29 Matsushita Electric Ind Co Ltd
JPS565106A (en) * 1979-06-11 1981-01-20 Shell Int Research Method and device for removing acidic component
JPH024636B2 (zh) * 1979-06-11 1990-01-29 Sheru Intern Risaachi Maachatsupii Bv
JPS556889A (en) * 1979-06-20 1980-01-18 Hitachi Ltd Positioning device of pellet
JPS5652450B2 (zh) * 1979-06-20 1981-12-12
JPS592135U (ja) * 1982-06-28 1984-01-09 株式会社東芝 ウエハ回転装置
JPS626690Y2 (zh) * 1982-06-28 1987-02-16

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