JPS49107482A - - Google Patents
Info
- Publication number
- JPS49107482A JPS49107482A JP1874073A JP1874073A JPS49107482A JP S49107482 A JPS49107482 A JP S49107482A JP 1874073 A JP1874073 A JP 1874073A JP 1874073 A JP1874073 A JP 1874073A JP S49107482 A JPS49107482 A JP S49107482A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1874073A JPS5647708B2 (ja) | 1973-02-15 | 1973-02-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1874073A JPS5647708B2 (ja) | 1973-02-15 | 1973-02-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS49107482A true JPS49107482A (ja) | 1974-10-12 |
| JPS5647708B2 JPS5647708B2 (ja) | 1981-11-11 |
Family
ID=11980052
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1874073A Expired JPS5647708B2 (ja) | 1973-02-15 | 1973-02-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5647708B2 (ja) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52182A (en) * | 1975-06-20 | 1977-01-05 | Nec Corp | Method of forming planar type fet electrodes |
| JPS5567173A (en) * | 1978-11-13 | 1980-05-21 | Xerox Corp | Selffmatching mesfet and method of manufacturing same |
| JPH03171621A (ja) * | 1989-11-29 | 1991-07-25 | Mitsubishi Electric Corp | 多層膜構造の半導体装置およびその製造方法 |
| JPH03173126A (ja) * | 1989-11-30 | 1991-07-26 | Mitsubishi Electric Corp | 多層膜構造の半導体装置およびその製造方法 |
-
1973
- 1973-02-15 JP JP1874073A patent/JPS5647708B2/ja not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52182A (en) * | 1975-06-20 | 1977-01-05 | Nec Corp | Method of forming planar type fet electrodes |
| JPS5567173A (en) * | 1978-11-13 | 1980-05-21 | Xerox Corp | Selffmatching mesfet and method of manufacturing same |
| JPS6239549B2 (ja) * | 1978-11-13 | 1987-08-24 | Xerox Corp | |
| JPH03171621A (ja) * | 1989-11-29 | 1991-07-25 | Mitsubishi Electric Corp | 多層膜構造の半導体装置およびその製造方法 |
| JPH03173126A (ja) * | 1989-11-30 | 1991-07-26 | Mitsubishi Electric Corp | 多層膜構造の半導体装置およびその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5647708B2 (ja) | 1981-11-11 |