JPS4910739A - - Google Patents
Info
- Publication number
- JPS4910739A JPS4910739A JP47051647A JP5164772A JPS4910739A JP S4910739 A JPS4910739 A JP S4910739A JP 47051647 A JP47051647 A JP 47051647A JP 5164772 A JP5164772 A JP 5164772A JP S4910739 A JPS4910739 A JP S4910739A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
- Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
- Electron Sources, Ion Sources (AREA)
- Optical Recording Or Reproduction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47051647A JPS4910739A (ja) | 1972-05-26 | 1972-05-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47051647A JPS4910739A (ja) | 1972-05-26 | 1972-05-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4910739A true JPS4910739A (ja) | 1974-01-30 |
Family
ID=12892632
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47051647A Pending JPS4910739A (ja) | 1972-05-26 | 1972-05-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4910739A (ja) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56145640A (en) * | 1980-03-20 | 1981-11-12 | Siemens Ag | Large current electron source |
| JPS59107513A (ja) * | 1982-12-13 | 1984-06-21 | Toshiba Mach Co Ltd | 電子ビ−ム描画装置の偏向電圧発生装置 |
| JPS6055621A (ja) * | 1983-09-07 | 1985-03-30 | Hitachi Ltd | 電子ビ−ムの露光装置 |
| JPS6373635A (ja) * | 1986-09-17 | 1988-04-04 | Toshiba Corp | 半導体ウエハ表面検査用レ−ザビ−ムの走査方法および走査装置 |
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1972
- 1972-05-26 JP JP47051647A patent/JPS4910739A/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56145640A (en) * | 1980-03-20 | 1981-11-12 | Siemens Ag | Large current electron source |
| JPH0226342B2 (ja) * | 1980-03-20 | 1990-06-08 | Siemens Ag | |
| JPS59107513A (ja) * | 1982-12-13 | 1984-06-21 | Toshiba Mach Co Ltd | 電子ビ−ム描画装置の偏向電圧発生装置 |
| JPS6055621A (ja) * | 1983-09-07 | 1985-03-30 | Hitachi Ltd | 電子ビ−ムの露光装置 |
| JPS6373635A (ja) * | 1986-09-17 | 1988-04-04 | Toshiba Corp | 半導体ウエハ表面検査用レ−ザビ−ムの走査方法および走査装置 |
| JPH0567062B2 (ja) * | 1986-09-17 | 1993-09-24 | Tokyo Shibaura Electric Co |