JPS49101812A - - Google Patents

Info

Publication number
JPS49101812A
JPS49101812A JP48012678A JP1267873A JPS49101812A JP S49101812 A JPS49101812 A JP S49101812A JP 48012678 A JP48012678 A JP 48012678A JP 1267873 A JP1267873 A JP 1267873A JP S49101812 A JPS49101812 A JP S49101812A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48012678A
Other languages
Japanese (ja)
Other versions
JPS5427116B2 (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1267873A priority Critical patent/JPS5427116B2/ja
Publication of JPS49101812A publication Critical patent/JPS49101812A/ja
Publication of JPS5427116B2 publication Critical patent/JPS5427116B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP1267873A 1973-01-31 1973-01-31 Expired JPS5427116B2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1267873A JPS5427116B2 (fr) 1973-01-31 1973-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1267873A JPS5427116B2 (fr) 1973-01-31 1973-01-31

Publications (2)

Publication Number Publication Date
JPS49101812A true JPS49101812A (fr) 1974-09-26
JPS5427116B2 JPS5427116B2 (fr) 1979-09-07

Family

ID=11812022

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1267873A Expired JPS5427116B2 (fr) 1973-01-31 1973-01-31

Country Status (1)

Country Link
JP (1) JPS5427116B2 (fr)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49129578A (fr) * 1973-03-27 1974-12-11
JPS5218337A (en) * 1975-08-01 1977-02-10 Sony Corp Optical unit
JPS5394580U (fr) * 1976-12-29 1978-08-01
JPS53147668U (fr) * 1977-04-26 1978-11-20
JPS57172202A (en) * 1981-04-17 1982-10-23 Hitachi Ltd Displacement generator
JPS5850008A (ja) * 1981-09-21 1983-03-24 Toshiba Corp 高精度移動テ−ブル装置
JPS6288008A (ja) * 1985-10-14 1987-04-22 Hitachi Ltd 多自由度空間微動機構
JPS62145309A (ja) * 1985-12-20 1987-06-29 Canon Inc 精密送り装置
JPS63244118A (ja) * 1987-03-30 1988-10-11 Agency Of Ind Science & Technol 圧電素子を用いた変位制御機構
JPS63299785A (ja) * 1987-05-29 1988-12-07 Res Dev Corp Of Japan 圧電・電歪素子を用いた衝撃力による微小移動装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58192966U (ja) * 1982-06-17 1983-12-22 ペルメレツク電極株式会社 電解処理用給電保持具

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5910155B2 (ja) * 1973-03-27 1984-03-07 トムソン セエ エス エフ 圧電くさびを利用した修正装置
JPS49129578A (fr) * 1973-03-27 1974-12-11
JPS5218337A (en) * 1975-08-01 1977-02-10 Sony Corp Optical unit
JPS5394580U (fr) * 1976-12-29 1978-08-01
JPS53147668U (fr) * 1977-04-26 1978-11-20
JPS57172202A (en) * 1981-04-17 1982-10-23 Hitachi Ltd Displacement generator
JPH0152911B2 (fr) * 1981-04-17 1989-11-10 Hitachi Ltd
JPS5850008A (ja) * 1981-09-21 1983-03-24 Toshiba Corp 高精度移動テ−ブル装置
JPS6288008A (ja) * 1985-10-14 1987-04-22 Hitachi Ltd 多自由度空間微動機構
JPS62145309A (ja) * 1985-12-20 1987-06-29 Canon Inc 精密送り装置
JPS63244118A (ja) * 1987-03-30 1988-10-11 Agency Of Ind Science & Technol 圧電素子を用いた変位制御機構
JPS63299785A (ja) * 1987-05-29 1988-12-07 Res Dev Corp Of Japan 圧電・電歪素子を用いた衝撃力による微小移動装置
JPH0452070B2 (fr) * 1987-05-29 1992-08-20 Shingijutsu Kaihatsu Jigyodan

Also Published As

Publication number Publication date
JPS5427116B2 (fr) 1979-09-07

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