JPS4899541A - - Google Patents
Info
- Publication number
- JPS4899541A JPS4899541A JP48007456A JP745673A JPS4899541A JP S4899541 A JPS4899541 A JP S4899541A JP 48007456 A JP48007456 A JP 48007456A JP 745673 A JP745673 A JP 745673A JP S4899541 A JPS4899541 A JP S4899541A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0629—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion
- F16C32/064—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion the liquid being supplied under pressure
- F16C32/0644—Details of devices to control the supply of liquids to the bearings
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7781—With separate connected fluid reactor surface
- Y10T137/7784—Responsive to change in rate of fluid flow
- Y10T137/7787—Expansible chamber subject to differential pressures
- Y10T137/7791—Pressures across flow line valve
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US23000472A | 1972-02-28 | 1972-02-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4899541A true JPS4899541A (ja) | 1973-12-17 |
Family
ID=22863572
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP48007456A Pending JPS4899541A (ja) | 1972-02-28 | 1973-01-18 |
Country Status (3)
Country | Link |
---|---|
US (1) | US3758175A (ja) |
JP (1) | JPS4899541A (ja) |
DE (1) | DE2300740A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015048863A (ja) * | 2013-08-30 | 2015-03-16 | 株式会社ジェイテクト | 可変絞り形静圧軸受 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56126547A (en) * | 1980-03-06 | 1981-10-03 | Makino Milling Mach Co Ltd | Machine equipped with load compensating guide face |
DE3144788A1 (de) * | 1981-11-11 | 1983-05-19 | Fa. Carl Zeiss, 7920 Heidenheim | Drossel fuer gaslager |
US6315450B1 (en) * | 1999-02-01 | 2001-11-13 | Etec Systems, Inc. | Diaphragm preload air bearing |
US7413612B2 (en) * | 2003-07-10 | 2008-08-19 | Applied Materials, Inc. | In situ substrate holder leveling method and apparatus |
US7572340B2 (en) | 2004-11-29 | 2009-08-11 | Applied Materials, Inc. | High resolution substrate holder leveling device and method |
RU2531755C9 (ru) * | 2009-06-05 | 2014-12-27 | Кси, Ллк | Система подачи жидкости с точно заданным непрерывно регулируемым давлением |
TWI641768B (zh) * | 2017-06-09 | 2018-11-21 | 國立清華大學 | 薄膜節流器及液靜壓軸承模組 |
TWI696767B (zh) | 2018-11-29 | 2020-06-21 | 財團法人工業技術研究院 | 液靜壓軸承總成 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1997404A (en) * | 1931-05-13 | 1935-04-09 | Automatic Sprinkler Company | Constant discharge sprinkler head |
US2086698A (en) * | 1935-03-19 | 1937-07-13 | Monarch Mfg Works Inc | Device for venting oil burner installations |
US2219408A (en) * | 1937-07-22 | 1940-10-29 | Phillips Petroleum Co | Automatic valve |
GB797528A (en) * | 1955-03-16 | 1958-07-02 | Nat Res Dev | Bearings for rotating shafts which are lubricated by gas |
GB1027395A (en) * | 1962-02-16 | 1966-04-27 | Nat Res Dev | Controlled fluid lubricated bearings |
GB1076404A (en) * | 1963-03-16 | 1967-07-19 | Asquith Ltd William | Improvements in silde bearing for machine tools |
US3308848A (en) * | 1964-07-27 | 1967-03-14 | Harold I Johnson | Fluid power transmission |
NL143322B (nl) * | 1966-06-04 | 1974-09-16 | Philips Nv | Hydrostatisch leger. |
-
1972
- 1972-02-28 US US00230004A patent/US3758175A/en not_active Expired - Lifetime
-
1973
- 1973-01-08 DE DE2300740A patent/DE2300740A1/de active Pending
- 1973-01-18 JP JP48007456A patent/JPS4899541A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015048863A (ja) * | 2013-08-30 | 2015-03-16 | 株式会社ジェイテクト | 可変絞り形静圧軸受 |
Also Published As
Publication number | Publication date |
---|---|
DE2300740A1 (de) | 1973-09-06 |
US3758175A (en) | 1973-09-11 |