JPS4899541A - - Google Patents

Info

Publication number
JPS4899541A
JPS4899541A JP48007456A JP745673A JPS4899541A JP S4899541 A JPS4899541 A JP S4899541A JP 48007456 A JP48007456 A JP 48007456A JP 745673 A JP745673 A JP 745673A JP S4899541 A JPS4899541 A JP S4899541A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP48007456A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4899541A publication Critical patent/JPS4899541A/ja
Pending legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/06Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0629Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion
    • F16C32/064Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion the liquid being supplied under pressure
    • F16C32/0644Details of devices to control the supply of liquids to the bearings
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/7722Line condition change responsive valves
    • Y10T137/7781With separate connected fluid reactor surface
    • Y10T137/7784Responsive to change in rate of fluid flow
    • Y10T137/7787Expansible chamber subject to differential pressures
    • Y10T137/7791Pressures across flow line valve
JP48007456A 1972-02-28 1973-01-18 Pending JPS4899541A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US23000472A 1972-02-28 1972-02-28

Publications (1)

Publication Number Publication Date
JPS4899541A true JPS4899541A (ja) 1973-12-17

Family

ID=22863572

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48007456A Pending JPS4899541A (ja) 1972-02-28 1973-01-18

Country Status (3)

Country Link
US (1) US3758175A (ja)
JP (1) JPS4899541A (ja)
DE (1) DE2300740A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015048863A (ja) * 2013-08-30 2015-03-16 株式会社ジェイテクト 可変絞り形静圧軸受

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56126547A (en) * 1980-03-06 1981-10-03 Makino Milling Mach Co Ltd Machine equipped with load compensating guide face
DE3144788A1 (de) * 1981-11-11 1983-05-19 Fa. Carl Zeiss, 7920 Heidenheim Drossel fuer gaslager
US6315450B1 (en) * 1999-02-01 2001-11-13 Etec Systems, Inc. Diaphragm preload air bearing
US7413612B2 (en) * 2003-07-10 2008-08-19 Applied Materials, Inc. In situ substrate holder leveling method and apparatus
US7572340B2 (en) 2004-11-29 2009-08-11 Applied Materials, Inc. High resolution substrate holder leveling device and method
RU2531755C9 (ru) * 2009-06-05 2014-12-27 Кси, Ллк Система подачи жидкости с точно заданным непрерывно регулируемым давлением
TWI641768B (zh) * 2017-06-09 2018-11-21 國立清華大學 薄膜節流器及液靜壓軸承模組
TWI696767B (zh) 2018-11-29 2020-06-21 財團法人工業技術研究院 液靜壓軸承總成

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1997404A (en) * 1931-05-13 1935-04-09 Automatic Sprinkler Company Constant discharge sprinkler head
US2086698A (en) * 1935-03-19 1937-07-13 Monarch Mfg Works Inc Device for venting oil burner installations
US2219408A (en) * 1937-07-22 1940-10-29 Phillips Petroleum Co Automatic valve
GB797528A (en) * 1955-03-16 1958-07-02 Nat Res Dev Bearings for rotating shafts which are lubricated by gas
GB1027395A (en) * 1962-02-16 1966-04-27 Nat Res Dev Controlled fluid lubricated bearings
GB1076404A (en) * 1963-03-16 1967-07-19 Asquith Ltd William Improvements in silde bearing for machine tools
US3308848A (en) * 1964-07-27 1967-03-14 Harold I Johnson Fluid power transmission
NL143322B (nl) * 1966-06-04 1974-09-16 Philips Nv Hydrostatisch leger.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015048863A (ja) * 2013-08-30 2015-03-16 株式会社ジェイテクト 可変絞り形静圧軸受

Also Published As

Publication number Publication date
DE2300740A1 (de) 1973-09-06
US3758175A (en) 1973-09-11

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