JPS4898886A - - Google Patents
Info
- Publication number
- JPS4898886A JPS4898886A JP47030759A JP3075972A JPS4898886A JP S4898886 A JPS4898886 A JP S4898886A JP 47030759 A JP47030759 A JP 47030759A JP 3075972 A JP3075972 A JP 3075972A JP S4898886 A JPS4898886 A JP S4898886A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Image Processing (AREA)
- Image Analysis (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47030759A JPS4898886A (ru) | 1972-03-29 | 1972-03-29 | |
| DE19722256617 DE2256617C3 (de) | 1971-11-19 | 1972-11-17 | Einrichtung zur Analyse einer Vorlage |
| GB5352872A GB1417721A (en) | 1971-11-19 | 1972-11-20 | Detection apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47030759A JPS4898886A (ru) | 1972-03-29 | 1972-03-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4898886A true JPS4898886A (ru) | 1973-12-14 |
Family
ID=12312601
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47030759A Pending JPS4898886A (ru) | 1971-11-19 | 1972-03-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4898886A (ru) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50107987A (ru) * | 1974-01-30 | 1975-08-25 | ||
| JPS50127574A (ru) * | 1974-03-27 | 1975-10-07 | ||
| JPS50131469A (ru) * | 1974-04-03 | 1975-10-17 | ||
| JPS50141355A (ru) * | 1974-04-30 | 1975-11-13 | ||
| JPS5166857A (ru) * | 1974-10-17 | 1976-06-09 | Westinghouse Electric Corp | |
| JPS51149053A (en) * | 1975-06-17 | 1976-12-21 | Konishiroku Photo Ind Co Ltd | Area measuring method and device |
| JPS52133241A (en) * | 1976-04-30 | 1977-11-08 | Hitachi Shipbuilding Eng Co | Shape detecting apparatus |
| JPS535656A (en) * | 1976-07-06 | 1978-01-19 | Tokyo Kouon Denpa Kk | Signal discrimination sysem |
| WO1980001002A1 (en) * | 1978-10-30 | 1980-05-15 | Fujitsu Ltd | Pattern inspection system |
| JPS60117380A (ja) * | 1983-11-30 | 1985-06-24 | Fujitsu Ltd | パタ−ン処理方法 |
| JPS6251744U (ru) * | 1985-09-18 | 1987-03-31 | ||
| US4692690A (en) * | 1983-12-26 | 1987-09-08 | Hitachi, Ltd. | Pattern detecting apparatus |
| JPS6365347A (ja) * | 1986-09-06 | 1988-03-23 | Yatsuka Nakamura | 画像処理による特異点検出方法 |
-
1972
- 1972-03-29 JP JP47030759A patent/JPS4898886A/ja active Pending
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50107987A (ru) * | 1974-01-30 | 1975-08-25 | ||
| JPS6122254B2 (ru) * | 1974-01-30 | 1986-05-30 | Hitachi Ltd | |
| JPS50127574A (ru) * | 1974-03-27 | 1975-10-07 | ||
| JPS5924361B2 (ja) * | 1974-04-03 | 1984-06-08 | 株式会社日立製作所 | ２次元画像比較検査装置 |
| JPS50131469A (ru) * | 1974-04-03 | 1975-10-17 | ||
| JPS50141355A (ru) * | 1974-04-30 | 1975-11-13 | ||
| JPS5934961B2 (ja) * | 1974-04-30 | 1984-08-25 | 株式会社日立製作所 | パタ−ン検査方式 |
| JPS5166857A (ru) * | 1974-10-17 | 1976-06-09 | Westinghouse Electric Corp | |
| JPS51149053A (en) * | 1975-06-17 | 1976-12-21 | Konishiroku Photo Ind Co Ltd | Area measuring method and device |
| JPS52133241A (en) * | 1976-04-30 | 1977-11-08 | Hitachi Shipbuilding Eng Co | Shape detecting apparatus |
| JPS535656A (en) * | 1976-07-06 | 1978-01-19 | Tokyo Kouon Denpa Kk | Signal discrimination sysem |
| WO1980001002A1 (en) * | 1978-10-30 | 1980-05-15 | Fujitsu Ltd | Pattern inspection system |
| JPS60117380A (ja) * | 1983-11-30 | 1985-06-24 | Fujitsu Ltd | パタ−ン処理方法 |
| JPH0323948B2 (ru) * | 1983-11-30 | 1991-04-02 | Fujitsu Ltd | |
| US4692690A (en) * | 1983-12-26 | 1987-09-08 | Hitachi, Ltd. | Pattern detecting apparatus |
| JPS6251744U (ru) * | 1985-09-18 | 1987-03-31 | ||
| JPS6365347A (ja) * | 1986-09-06 | 1988-03-23 | Yatsuka Nakamura | 画像処理による特異点検出方法 |