JPS4898886A - - Google Patents

Info

Publication number
JPS4898886A
JPS4898886A JP47030759A JP3075972A JPS4898886A JP S4898886 A JPS4898886 A JP S4898886A JP 47030759 A JP47030759 A JP 47030759A JP 3075972 A JP3075972 A JP 3075972A JP S4898886 A JPS4898886 A JP S4898886A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP47030759A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47030759A priority Critical patent/JPS4898886A/ja
Priority to DE19722256617 priority patent/DE2256617C3/de
Priority to GB5352872A priority patent/GB1417721A/en
Publication of JPS4898886A publication Critical patent/JPS4898886A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Image Processing (AREA)
  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP47030759A 1971-11-19 1972-03-29 Pending JPS4898886A (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP47030759A JPS4898886A (fr) 1972-03-29 1972-03-29
DE19722256617 DE2256617C3 (de) 1971-11-19 1972-11-17 Einrichtung zur Analyse einer Vorlage
GB5352872A GB1417721A (en) 1971-11-19 1972-11-20 Detection apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47030759A JPS4898886A (fr) 1972-03-29 1972-03-29

Publications (1)

Publication Number Publication Date
JPS4898886A true JPS4898886A (fr) 1973-12-14

Family

ID=12312601

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47030759A Pending JPS4898886A (fr) 1971-11-19 1972-03-29

Country Status (1)

Country Link
JP (1) JPS4898886A (fr)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50107987A (fr) * 1974-01-30 1975-08-25
JPS50127574A (fr) * 1974-03-27 1975-10-07
JPS50131469A (fr) * 1974-04-03 1975-10-17
JPS50141355A (fr) * 1974-04-30 1975-11-13
JPS5166857A (fr) * 1974-10-17 1976-06-09 Westinghouse Electric Corp
JPS51149053A (en) * 1975-06-17 1976-12-21 Konishiroku Photo Ind Co Ltd Area measuring method and device
JPS52133241A (en) * 1976-04-30 1977-11-08 Hitachi Shipbuilding Eng Co Shape detecting apparatus
JPS535656A (en) * 1976-07-06 1978-01-19 Tokyo Kouon Denpa Kk Signal discrimination sysem
WO1980001002A1 (fr) * 1978-10-30 1980-05-15 Fujitsu Ltd Systeme d'inspection de motifs
JPS60117380A (ja) * 1983-11-30 1985-06-24 Fujitsu Ltd パタ−ン処理方法
JPS6251744U (fr) * 1985-09-18 1987-03-31
US4692690A (en) * 1983-12-26 1987-09-08 Hitachi, Ltd. Pattern detecting apparatus
JPS6365347A (ja) * 1986-09-06 1988-03-23 Yatsuka Nakamura 画像処理による特異点検出方法

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50107987A (fr) * 1974-01-30 1975-08-25
JPS6122254B2 (fr) * 1974-01-30 1986-05-30 Hitachi Ltd
JPS50127574A (fr) * 1974-03-27 1975-10-07
JPS5924361B2 (ja) * 1974-04-03 1984-06-08 株式会社日立製作所 ２次元画像比較検査装置
JPS50131469A (fr) * 1974-04-03 1975-10-17
JPS50141355A (fr) * 1974-04-30 1975-11-13
JPS5934961B2 (ja) * 1974-04-30 1984-08-25 株式会社日立製作所 パタ−ン検査方式
JPS5166857A (fr) * 1974-10-17 1976-06-09 Westinghouse Electric Corp
JPS51149053A (en) * 1975-06-17 1976-12-21 Konishiroku Photo Ind Co Ltd Area measuring method and device
JPS52133241A (en) * 1976-04-30 1977-11-08 Hitachi Shipbuilding Eng Co Shape detecting apparatus
JPS535656A (en) * 1976-07-06 1978-01-19 Tokyo Kouon Denpa Kk Signal discrimination sysem
WO1980001002A1 (fr) * 1978-10-30 1980-05-15 Fujitsu Ltd Systeme d'inspection de motifs
JPS60117380A (ja) * 1983-11-30 1985-06-24 Fujitsu Ltd パタ−ン処理方法
JPH0323948B2 (fr) * 1983-11-30 1991-04-02 Fujitsu Ltd
US4692690A (en) * 1983-12-26 1987-09-08 Hitachi, Ltd. Pattern detecting apparatus
JPS6251744U (fr) * 1985-09-18 1987-03-31
JPS6365347A (ja) * 1986-09-06 1988-03-23 Yatsuka Nakamura 画像処理による特異点検出方法

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