JPS4888982A - - Google Patents
Info
- Publication number
- JPS4888982A JPS4888982A JP1861572A JP1861572A JPS4888982A JP S4888982 A JPS4888982 A JP S4888982A JP 1861572 A JP1861572 A JP 1861572A JP 1861572 A JP1861572 A JP 1861572A JP S4888982 A JPS4888982 A JP S4888982A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1861572A JPS4888982A (enExample) | 1972-02-23 | 1972-02-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1861572A JPS4888982A (enExample) | 1972-02-23 | 1972-02-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4888982A true JPS4888982A (enExample) | 1973-11-21 |
Family
ID=11976517
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1861572A Pending JPS4888982A (enExample) | 1972-02-23 | 1972-02-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4888982A (enExample) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51391A (ja) * | 1974-06-19 | 1976-01-06 | Tooru Ishikawa | Tomeibannoshokonkenshutsusochi |
| JPS537288A (en) * | 1976-07-08 | 1978-01-23 | Hamamatsu Tv Co Ltd | Device for detecting flaws of transparent board |
| JPS5585209A (en) * | 1978-12-22 | 1980-06-27 | Hitachi Ltd | Inspection device for mask |
| JPS56150827A (en) * | 1980-04-25 | 1981-11-21 | Hitachi Ltd | Inspection device for abnormality of mask |
| JPS6236509A (ja) * | 1985-08-10 | 1987-02-17 | Fujitsu Ltd | 形状検査方法およびその装置 |
| JPS6423144A (en) * | 1987-07-20 | 1989-01-25 | Ratotsuku Syst Eng Kk | Method for detecting flaw in thin film layer of crystal substrate |
| JP2006214917A (ja) * | 2005-02-04 | 2006-08-17 | Sharp Corp | 基板の欠陥検出方法および欠陥検出装置 |
| JP2014059292A (ja) * | 2012-08-24 | 2014-04-03 | Hoya Corp | マスクブランク用基板の製造方法、マスクブランクの製造方法、転写用マスクの製造方法、半導体デバイスの製造方法、及び検査装置 |
-
1972
- 1972-02-23 JP JP1861572A patent/JPS4888982A/ja active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51391A (ja) * | 1974-06-19 | 1976-01-06 | Tooru Ishikawa | Tomeibannoshokonkenshutsusochi |
| JPS537288A (en) * | 1976-07-08 | 1978-01-23 | Hamamatsu Tv Co Ltd | Device for detecting flaws of transparent board |
| JPS5585209A (en) * | 1978-12-22 | 1980-06-27 | Hitachi Ltd | Inspection device for mask |
| JPS56150827A (en) * | 1980-04-25 | 1981-11-21 | Hitachi Ltd | Inspection device for abnormality of mask |
| JPS6236509A (ja) * | 1985-08-10 | 1987-02-17 | Fujitsu Ltd | 形状検査方法およびその装置 |
| JPS6423144A (en) * | 1987-07-20 | 1989-01-25 | Ratotsuku Syst Eng Kk | Method for detecting flaw in thin film layer of crystal substrate |
| JP2006214917A (ja) * | 2005-02-04 | 2006-08-17 | Sharp Corp | 基板の欠陥検出方法および欠陥検出装置 |
| JP2014059292A (ja) * | 2012-08-24 | 2014-04-03 | Hoya Corp | マスクブランク用基板の製造方法、マスクブランクの製造方法、転写用マスクの製造方法、半導体デバイスの製造方法、及び検査装置 |