JPS4887778A - - Google Patents
Info
- Publication number
- JPS4887778A JPS4887778A JP47017251A JP1725172A JPS4887778A JP S4887778 A JPS4887778 A JP S4887778A JP 47017251 A JP47017251 A JP 47017251A JP 1725172 A JP1725172 A JP 1725172A JP S4887778 A JPS4887778 A JP S4887778A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1725172A JPS5643608B2 (ja) | 1972-02-21 | 1972-02-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1725172A JPS5643608B2 (ja) | 1972-02-21 | 1972-02-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4887778A true JPS4887778A (ja) | 1973-11-17 |
| JPS5643608B2 JPS5643608B2 (ja) | 1981-10-14 |
Family
ID=11938718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1725172A Expired JPS5643608B2 (ja) | 1972-02-21 | 1972-02-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5643608B2 (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6351631A (ja) * | 1986-08-20 | 1988-03-04 | Sanyo Electric Co Ltd | 半導体装置の製造方法 |
| JPH01103834A (ja) * | 1987-10-16 | 1989-04-20 | Sanyo Electric Co Ltd | 半導体装置の製造方法 |
| JPH01218019A (ja) * | 1988-02-26 | 1989-08-31 | Mitsubishi Electric Corp | アライメントマークが形成された半導体基板 |
-
1972
- 1972-02-21 JP JP1725172A patent/JPS5643608B2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6351631A (ja) * | 1986-08-20 | 1988-03-04 | Sanyo Electric Co Ltd | 半導体装置の製造方法 |
| JPH01103834A (ja) * | 1987-10-16 | 1989-04-20 | Sanyo Electric Co Ltd | 半導体装置の製造方法 |
| JPH0553296B2 (ja) * | 1987-10-16 | 1993-08-09 | Sanyo Electric Co | |
| JPH01218019A (ja) * | 1988-02-26 | 1989-08-31 | Mitsubishi Electric Corp | アライメントマークが形成された半導体基板 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5643608B2 (ja) | 1981-10-14 |