JPS4884784A - - Google Patents
Info
- Publication number
- JPS4884784A JPS4884784A JP1597372A JP1597372A JPS4884784A JP S4884784 A JPS4884784 A JP S4884784A JP 1597372 A JP1597372 A JP 1597372A JP 1597372 A JP1597372 A JP 1597372A JP S4884784 A JPS4884784 A JP S4884784A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1597372A JPS5140875B2 (https=) | 1972-02-17 | 1972-02-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1597372A JPS5140875B2 (https=) | 1972-02-17 | 1972-02-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4884784A true JPS4884784A (https=) | 1973-11-10 |
| JPS5140875B2 JPS5140875B2 (https=) | 1976-11-06 |
Family
ID=11903637
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1597372A Expired JPS5140875B2 (https=) | 1972-02-17 | 1972-02-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5140875B2 (https=) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50133936A (https=) * | 1974-04-15 | 1975-10-23 | ||
| JPS50161475A (https=) * | 1974-06-20 | 1975-12-27 | ||
| JPS5197544A (en) * | 1975-02-26 | 1976-08-27 | Kuroomuhimakuno keiseihoho | |
| JPS54132490A (en) * | 1977-12-22 | 1979-10-15 | Siemens Ag | Electric conductive layer of graphite body coating method |
| JPS5648559U (https=) * | 1980-09-04 | 1981-04-30 | ||
| JPS61174371A (ja) * | 1985-01-28 | 1986-08-06 | Hitachi Ltd | 薄膜作成装置 |
| JPS61217571A (ja) * | 1985-03-25 | 1986-09-27 | Hitachi Ltd | 薄膜形成装置 |
-
1972
- 1972-02-17 JP JP1597372A patent/JPS5140875B2/ja not_active Expired
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50133936A (https=) * | 1974-04-15 | 1975-10-23 | ||
| JPS50161475A (https=) * | 1974-06-20 | 1975-12-27 | ||
| JPS5197544A (en) * | 1975-02-26 | 1976-08-27 | Kuroomuhimakuno keiseihoho | |
| JPS54132490A (en) * | 1977-12-22 | 1979-10-15 | Siemens Ag | Electric conductive layer of graphite body coating method |
| JPS5648559U (https=) * | 1980-09-04 | 1981-04-30 | ||
| JPS61174371A (ja) * | 1985-01-28 | 1986-08-06 | Hitachi Ltd | 薄膜作成装置 |
| JPS61217571A (ja) * | 1985-03-25 | 1986-09-27 | Hitachi Ltd | 薄膜形成装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5140875B2 (https=) | 1976-11-06 |