JPS4880282A - - Google Patents

Info

Publication number
JPS4880282A
JPS4880282A JP1055272A JP1055272A JPS4880282A JP S4880282 A JPS4880282 A JP S4880282A JP 1055272 A JP1055272 A JP 1055272A JP 1055272 A JP1055272 A JP 1055272A JP S4880282 A JPS4880282 A JP S4880282A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1055272A
Other versions
JPS5219760B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1055272A priority Critical patent/JPS5219760B2/ja
Publication of JPS4880282A publication Critical patent/JPS4880282A/ja
Publication of JPS5219760B2 publication Critical patent/JPS5219760B2/ja
Expired legal-status Critical Current

Links

JP1055272A 1972-01-31 1972-01-31 Expired JPS5219760B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1055272A JPS5219760B2 (ja) 1972-01-31 1972-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1055272A JPS5219760B2 (ja) 1972-01-31 1972-01-31

Publications (2)

Publication Number Publication Date
JPS4880282A true JPS4880282A (ja) 1973-10-27
JPS5219760B2 JPS5219760B2 (ja) 1977-05-30

Family

ID=11753406

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1055272A Expired JPS5219760B2 (ja) 1972-01-31 1972-01-31

Country Status (1)

Country Link
JP (1) JPS5219760B2 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50120988A (ja) * 1974-03-11 1975-09-22
JPS5146882A (en) * 1974-10-18 1976-04-21 Mitsubishi Electric Corp Handotaisochi oyobisono seizohoho
JPS5164381A (ja) * 1974-12-02 1976-06-03 Mitsubishi Electric Corp Handotaikaiheisochi
JPS5950531A (ja) * 1982-09-16 1984-03-23 Toshiba Corp 半導体装置及びその製造方法
JPS6074536A (ja) * 1983-09-30 1985-04-26 Toshiba Corp 半導体装置の製造方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50120988A (ja) * 1974-03-11 1975-09-22
JPS555269B2 (ja) * 1974-03-11 1980-02-05
JPS5146882A (en) * 1974-10-18 1976-04-21 Mitsubishi Electric Corp Handotaisochi oyobisono seizohoho
JPS5530306B2 (ja) * 1974-10-18 1980-08-09
JPS5164381A (ja) * 1974-12-02 1976-06-03 Mitsubishi Electric Corp Handotaikaiheisochi
JPS5950531A (ja) * 1982-09-16 1984-03-23 Toshiba Corp 半導体装置及びその製造方法
JPS6074536A (ja) * 1983-09-30 1985-04-26 Toshiba Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5219760B2 (ja) 1977-05-30

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