JPS4864885A - - Google Patents

Info

Publication number
JPS4864885A
JPS4864885A JP47106342A JP10634272A JPS4864885A JP S4864885 A JPS4864885 A JP S4864885A JP 47106342 A JP47106342 A JP 47106342A JP 10634272 A JP10634272 A JP 10634272A JP S4864885 A JPS4864885 A JP S4864885A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47106342A
Other languages
Japanese (ja)
Other versions
JPS5236676B2 (index.php
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4864885A publication Critical patent/JPS4864885A/ja
Publication of JPS5236676B2 publication Critical patent/JPS5236676B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2607—Circuits therefor
    • G01R31/2637—Circuits therefor for testing other individual devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Formation Of Insulating Films (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP47106342A 1971-11-30 1972-10-25 Expired JPS5236676B2 (index.php)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US20338571A 1971-11-30 1971-11-30

Publications (2)

Publication Number Publication Date
JPS4864885A true JPS4864885A (index.php) 1973-09-07
JPS5236676B2 JPS5236676B2 (index.php) 1977-09-17

Family

ID=22753767

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47106342A Expired JPS5236676B2 (index.php) 1971-11-30 1972-10-25

Country Status (5)

Country Link
US (1) US3796955A (index.php)
JP (1) JPS5236676B2 (index.php)
DE (1) DE2257649C3 (index.php)
FR (1) FR2161968B1 (index.php)
GB (1) GB1380287A (index.php)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57164534A (en) * 1981-04-03 1982-10-09 Nec Corp Screening method for semiconductor element

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4816753A (en) * 1987-05-21 1989-03-28 Advanced Research And Applications Corporation Method for reliability testing of integrated circuits
US5498974A (en) * 1994-12-30 1996-03-12 International Business Machines Corporation Contactless corona-oxide-semiconductor Q-V mobile charge measurement method and apparatus
AU6956196A (en) * 1995-08-23 1997-03-27 Gregory J. Gormley Method and apparatus for testing and measuring for porosity and anomalies of nonconductive materials using electron beam
US6005409A (en) * 1996-06-04 1999-12-21 Advanced Micro Devices, Inc. Detection of process-induced damage on transistors in real time
US6356097B1 (en) * 1997-06-20 2002-03-12 Applied Materials, Inc. Capacitive probe for in situ measurement of wafer DC bias voltage
US6891359B2 (en) * 2003-01-24 2005-05-10 International Business Machines Corporation Circuitry and methodology to establish correlation between gate dielectric test site reliability and product gate reliability

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57164534A (en) * 1981-04-03 1982-10-09 Nec Corp Screening method for semiconductor element

Also Published As

Publication number Publication date
DE2257649C3 (de) 1981-02-19
FR2161968B1 (index.php) 1974-08-19
US3796955A (en) 1974-03-12
DE2257649B2 (de) 1980-06-12
JPS5236676B2 (index.php) 1977-09-17
FR2161968A1 (index.php) 1973-07-13
DE2257649A1 (de) 1973-06-07
GB1380287A (en) 1975-01-08

Similar Documents

Publication Publication Date Title
FR2161968B1 (index.php)
AU2658571A (index.php)
AU3005371A (index.php)
AU2894671A (index.php)
AU2564071A (index.php)
AU2684071A (index.php)
AU2941471A (index.php)
AU2952271A (index.php)
AU2588771A (index.php)
AU2503871A (index.php)
AU2755871A (index.php)
AU2836771A (index.php)
AU2854371A (index.php)
AU1109576A (index.php)
AU2875571A (index.php)
AU2486471A (index.php)
AU2880771A (index.php)
AU2885171A (index.php)
AR192311Q (index.php)
AU2654071A (index.php)
AU3038671A (index.php)
AU3025871A (index.php)
AU2577671A (index.php)
AU2963771A (index.php)
AU2669471A (index.php)