JPS4860878A - - Google Patents

Info

Publication number
JPS4860878A
JPS4860878A JP47116739A JP11673972A JPS4860878A JP S4860878 A JPS4860878 A JP S4860878A JP 47116739 A JP47116739 A JP 47116739A JP 11673972 A JP11673972 A JP 11673972A JP S4860878 A JPS4860878 A JP S4860878A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47116739A
Other languages
Japanese (ja)
Other versions
JPS52676B2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4860878A publication Critical patent/JPS4860878A/ja
Publication of JPS52676B2 publication Critical patent/JPS52676B2/ja
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/60Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of BJTs
    • H10D84/641Combinations of only vertical BJTs
    • H10D84/642Combinations of non-inverted vertical BJTs of the same conductivity type having different characteristics, e.g. Darlington transistors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76Making of isolation regions between components
    • H01L21/761PN junctions

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Bipolar Transistors (AREA)
  • Bipolar Integrated Circuits (AREA)
JP47116739A 1971-11-22 1972-11-22 Expired JPS52676B2 (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7141734A FR2160709B1 (enExample) 1971-11-22 1971-11-22

Publications (2)

Publication Number Publication Date
JPS4860878A true JPS4860878A (enExample) 1973-08-25
JPS52676B2 JPS52676B2 (enExample) 1977-01-10

Family

ID=9086150

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47116739A Expired JPS52676B2 (enExample) 1971-11-22 1972-11-22

Country Status (6)

Country Link
JP (1) JPS52676B2 (enExample)
CA (1) CA984974A (enExample)
DE (1) DE2256883C3 (enExample)
FR (1) FR2160709B1 (enExample)
GB (1) GB1408627A (enExample)
IT (1) IT975787B (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2608267A1 (de) * 1976-02-28 1977-09-08 Itt Ind Gmbh Deutsche Verfahren zum herstellen einer monolithisch integrierten schaltung

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3547716A (en) * 1968-09-05 1970-12-15 Ibm Isolation in epitaxially grown monolithic devices
US3566218A (en) * 1968-10-02 1971-02-23 Nat Semiconductor Corp The Multiple base width integrated circuit

Also Published As

Publication number Publication date
DE2256883B2 (de) 1980-07-10
DE2256883C3 (de) 1981-03-12
FR2160709A1 (enExample) 1973-07-06
FR2160709B1 (enExample) 1974-09-27
DE2256883A1 (de) 1973-05-30
IT975787B (it) 1974-08-10
JPS52676B2 (enExample) 1977-01-10
GB1408627A (en) 1975-10-01
CA984974A (en) 1976-03-02

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