JPS4856581A - - Google Patents
Info
- Publication number
- JPS4856581A JPS4856581A JP8471971A JP8471971A JPS4856581A JP S4856581 A JPS4856581 A JP S4856581A JP 8471971 A JP8471971 A JP 8471971A JP 8471971 A JP8471971 A JP 8471971A JP S4856581 A JPS4856581 A JP S4856581A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8471971A JPS4856581A (enExample) | 1971-10-27 | 1971-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8471971A JPS4856581A (enExample) | 1971-10-27 | 1971-10-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4856581A true JPS4856581A (enExample) | 1973-08-08 |
Family
ID=13838474
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8471971A Pending JPS4856581A (enExample) | 1971-10-27 | 1971-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4856581A (enExample) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51124353U (enExample) * | 1975-03-31 | 1976-10-07 | ||
| JPS60119744U (ja) * | 1984-01-24 | 1985-08-13 | ロ−ム株式会社 | エピタキシヤル層の形成工程に使用するウエハ用ホルダ− |
| JPS60166142U (ja) * | 1984-04-12 | 1985-11-05 | 三菱マテリアル株式会社 | 半導体ウエハの気相成長装置 |
| JPS6117494A (ja) * | 1984-07-02 | 1986-01-25 | Nec Corp | 気相成長装置 |
| JPH05251371A (ja) * | 1992-07-20 | 1993-09-28 | Rohm Co Ltd | 半導体装置の製造方法 |
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1971
- 1971-10-27 JP JP8471971A patent/JPS4856581A/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51124353U (enExample) * | 1975-03-31 | 1976-10-07 | ||
| JPS60119744U (ja) * | 1984-01-24 | 1985-08-13 | ロ−ム株式会社 | エピタキシヤル層の形成工程に使用するウエハ用ホルダ− |
| JPS60166142U (ja) * | 1984-04-12 | 1985-11-05 | 三菱マテリアル株式会社 | 半導体ウエハの気相成長装置 |
| JPS6117494A (ja) * | 1984-07-02 | 1986-01-25 | Nec Corp | 気相成長装置 |
| JPH05251371A (ja) * | 1992-07-20 | 1993-09-28 | Rohm Co Ltd | 半導体装置の製造方法 |