JPS4856581A - - Google Patents

Info

Publication number
JPS4856581A
JPS4856581A JP8471971A JP8471971A JPS4856581A JP S4856581 A JPS4856581 A JP S4856581A JP 8471971 A JP8471971 A JP 8471971A JP 8471971 A JP8471971 A JP 8471971A JP S4856581 A JPS4856581 A JP S4856581A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8471971A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8471971A priority Critical patent/JPS4856581A/ja
Publication of JPS4856581A publication Critical patent/JPS4856581A/ja
Pending legal-status Critical Current

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Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP8471971A 1971-10-27 1971-10-27 Pending JPS4856581A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8471971A JPS4856581A (enrdf_load_stackoverflow) 1971-10-27 1971-10-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8471971A JPS4856581A (enrdf_load_stackoverflow) 1971-10-27 1971-10-27

Publications (1)

Publication Number Publication Date
JPS4856581A true JPS4856581A (enrdf_load_stackoverflow) 1973-08-08

Family

ID=13838474

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8471971A Pending JPS4856581A (enrdf_load_stackoverflow) 1971-10-27 1971-10-27

Country Status (1)

Country Link
JP (1) JPS4856581A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51124353U (enrdf_load_stackoverflow) * 1975-03-31 1976-10-07
JPS60119744U (ja) * 1984-01-24 1985-08-13 ロ−ム株式会社 エピタキシヤル層の形成工程に使用するウエハ用ホルダ−
JPS60166142U (ja) * 1984-04-12 1985-11-05 三菱マテリアル株式会社 半導体ウエハの気相成長装置
JPS6117494A (ja) * 1984-07-02 1986-01-25 Nec Corp 気相成長装置
JPH05251371A (ja) * 1992-07-20 1993-09-28 Rohm Co Ltd 半導体装置の製造方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51124353U (enrdf_load_stackoverflow) * 1975-03-31 1976-10-07
JPS60119744U (ja) * 1984-01-24 1985-08-13 ロ−ム株式会社 エピタキシヤル層の形成工程に使用するウエハ用ホルダ−
JPS60166142U (ja) * 1984-04-12 1985-11-05 三菱マテリアル株式会社 半導体ウエハの気相成長装置
JPS6117494A (ja) * 1984-07-02 1986-01-25 Nec Corp 気相成長装置
JPH05251371A (ja) * 1992-07-20 1993-09-28 Rohm Co Ltd 半導体装置の製造方法

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