JPS4852479A - - Google Patents
Info
- Publication number
- JPS4852479A JPS4852479A JP46087566A JP8756671A JPS4852479A JP S4852479 A JPS4852479 A JP S4852479A JP 46087566 A JP46087566 A JP 46087566A JP 8756671 A JP8756671 A JP 8756671A JP S4852479 A JPS4852479 A JP S4852479A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46087566A JPS4852479A (online.php) | 1971-11-05 | 1971-11-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46087566A JPS4852479A (online.php) | 1971-11-05 | 1971-11-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4852479A true JPS4852479A (online.php) | 1973-07-23 |
Family
ID=13918524
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP46087566A Pending JPS4852479A (online.php) | 1971-11-05 | 1971-11-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4852479A (online.php) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50128469A (online.php) * | 1974-03-27 | 1975-10-09 | ||
| JPS50159268A (online.php) * | 1974-06-11 | 1975-12-23 | ||
| JPS5213779A (en) * | 1975-07-22 | 1977-02-02 | Fujitsu Ltd | Selecteive etching method |
| JPS5255816A (en) * | 1975-11-04 | 1977-05-07 | Matsushita Electric Ind Co Ltd | Synchronous combination reproduction system |
| JPS5429976A (en) * | 1977-08-10 | 1979-03-06 | Nec Home Electronics Ltd | Manufacture of semiconductor device |
| JPS56116625A (en) * | 1980-02-20 | 1981-09-12 | Sanyo Electric Co Ltd | Exposure of fine pattern |
| WO2006025266A1 (ja) * | 2004-08-30 | 2006-03-09 | Toray Industries, Inc. | ディスプレイ用部材の露光方法およびプラズマディスプレイ用部材の製造方法 |
| JP2007010846A (ja) * | 2005-06-29 | 2007-01-18 | Toppan Printing Co Ltd | フォトマスク及びこれを用いた露光方法 |
-
1971
- 1971-11-05 JP JP46087566A patent/JPS4852479A/ja active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50128469A (online.php) * | 1974-03-27 | 1975-10-09 | ||
| JPS50159268A (online.php) * | 1974-06-11 | 1975-12-23 | ||
| JPS5213779A (en) * | 1975-07-22 | 1977-02-02 | Fujitsu Ltd | Selecteive etching method |
| JPS5255816A (en) * | 1975-11-04 | 1977-05-07 | Matsushita Electric Ind Co Ltd | Synchronous combination reproduction system |
| JPS5429976A (en) * | 1977-08-10 | 1979-03-06 | Nec Home Electronics Ltd | Manufacture of semiconductor device |
| JPS56116625A (en) * | 1980-02-20 | 1981-09-12 | Sanyo Electric Co Ltd | Exposure of fine pattern |
| WO2006025266A1 (ja) * | 2004-08-30 | 2006-03-09 | Toray Industries, Inc. | ディスプレイ用部材の露光方法およびプラズマディスプレイ用部材の製造方法 |
| US8263319B2 (en) | 2004-08-30 | 2012-09-11 | Panasonic Corporation | Display member exposing method and plasma display member manufacturing method |
| JP2007010846A (ja) * | 2005-06-29 | 2007-01-18 | Toppan Printing Co Ltd | フォトマスク及びこれを用いた露光方法 |