JPS4847768A - - Google Patents

Info

Publication number
JPS4847768A
JPS4847768A JP46082730A JP8273071A JPS4847768A JP S4847768 A JPS4847768 A JP S4847768A JP 46082730 A JP46082730 A JP 46082730A JP 8273071 A JP8273071 A JP 8273071A JP S4847768 A JPS4847768 A JP S4847768A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP46082730A
Other languages
Japanese (ja)
Other versions
JPS5433514B2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8273071A priority Critical patent/JPS5433514B2/ja
Publication of JPS4847768A publication Critical patent/JPS4847768A/ja
Publication of JPS5433514B2 publication Critical patent/JPS5433514B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP8273071A 1971-10-19 1971-10-19 Expired JPS5433514B2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8273071A JPS5433514B2 (enExample) 1971-10-19 1971-10-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8273071A JPS5433514B2 (enExample) 1971-10-19 1971-10-19

Publications (2)

Publication Number Publication Date
JPS4847768A true JPS4847768A (enExample) 1973-07-06
JPS5433514B2 JPS5433514B2 (enExample) 1979-10-20

Family

ID=13782525

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8273071A Expired JPS5433514B2 (enExample) 1971-10-19 1971-10-19

Country Status (1)

Country Link
JP (1) JPS5433514B2 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5861643A (ja) * 1981-09-18 1983-04-12 エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン 半導体装置の製造方法
JPS6052018A (ja) * 1983-08-31 1985-03-23 Nec Corp 砒化ガリウム高抵抗パタ−ン形成方法
JPH02119265A (ja) * 1988-10-28 1990-05-07 Nec Corp 化合物半導体装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5861643A (ja) * 1981-09-18 1983-04-12 エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン 半導体装置の製造方法
JPS6052018A (ja) * 1983-08-31 1985-03-23 Nec Corp 砒化ガリウム高抵抗パタ−ン形成方法
JPH02119265A (ja) * 1988-10-28 1990-05-07 Nec Corp 化合物半導体装置

Also Published As

Publication number Publication date
JPS5433514B2 (enExample) 1979-10-20

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