JPS4847284A - - Google Patents
Info
- Publication number
- JPS4847284A JPS4847284A JP47101040A JP10104072A JPS4847284A JP S4847284 A JPS4847284 A JP S4847284A JP 47101040 A JP47101040 A JP 47101040A JP 10104072 A JP10104072 A JP 10104072A JP S4847284 A JPS4847284 A JP S4847284A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US18773971A | 1971-10-08 | 1971-10-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4847284A true JPS4847284A (https=) | 1973-07-05 |
Family
ID=22690259
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47101040A Pending JPS4847284A (https=) | 1971-10-08 | 1972-10-07 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS4847284A (https=) |
| DE (1) | DE2247368A1 (https=) |
| GB (1) | GB1345093A (https=) |
| IT (1) | IT967781B (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50145094A (https=) * | 1974-05-10 | 1975-11-21 | ||
| JPS599942A (ja) * | 1982-07-08 | 1984-01-19 | Mitsubishi Electric Corp | 配線パタ−ン形成法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56128946A (en) * | 1980-03-14 | 1981-10-08 | Fujitsu Ltd | Photomask correcting method |
-
1972
- 1972-09-22 IT IT29575/72A patent/IT967781B/it active
- 1972-09-27 DE DE19722247368 patent/DE2247368A1/de active Pending
- 1972-09-29 GB GB4496972A patent/GB1345093A/en not_active Expired
- 1972-10-07 JP JP47101040A patent/JPS4847284A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50145094A (https=) * | 1974-05-10 | 1975-11-21 | ||
| JPS599942A (ja) * | 1982-07-08 | 1984-01-19 | Mitsubishi Electric Corp | 配線パタ−ン形成法 |
Also Published As
| Publication number | Publication date |
|---|---|
| GB1345093A (en) | 1974-01-30 |
| IT967781B (it) | 1974-03-11 |
| DE2247368A1 (de) | 1973-04-12 |