IT967781B - Metodo per la riparazione di di fetti in sottili strati pellico lari configurati - Google Patents
Metodo per la riparazione di di fetti in sottili strati pellico lari configuratiInfo
- Publication number
- IT967781B IT967781B IT2957572A IT2957572A IT967781B IT 967781 B IT967781 B IT 967781B IT 2957572 A IT2957572 A IT 2957572A IT 2957572 A IT2957572 A IT 2957572A IT 967781 B IT967781 B IT 967781B
- Authority
- IT
- Italy
- Prior art keywords
- pellico
- lari
- slices
- repair
- layers
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US18773971A | 1971-10-08 | 1971-10-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IT967781B true IT967781B (it) | 1974-03-11 |
Family
ID=22690259
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IT2957572A IT967781B (it) | 1971-10-08 | 1972-09-22 | Metodo per la riparazione di di fetti in sottili strati pellico lari configurati |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS4847284A (it) |
| DE (1) | DE2247368A1 (it) |
| GB (1) | GB1345093A (it) |
| IT (1) | IT967781B (it) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5632777B2 (it) * | 1974-05-10 | 1981-07-30 | ||
| JPS56128946A (en) * | 1980-03-14 | 1981-10-08 | Fujitsu Ltd | Photomask correcting method |
| JPS599942A (ja) * | 1982-07-08 | 1984-01-19 | Mitsubishi Electric Corp | 配線パタ−ン形成法 |
-
1972
- 1972-09-22 IT IT2957572A patent/IT967781B/it active
- 1972-09-27 DE DE19722247368 patent/DE2247368A1/de active Pending
- 1972-09-29 GB GB4496972A patent/GB1345093A/en not_active Expired
- 1972-10-07 JP JP10104072A patent/JPS4847284A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| GB1345093A (en) | 1974-01-30 |
| DE2247368A1 (de) | 1973-04-12 |
| JPS4847284A (it) | 1973-07-05 |
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