GB1345093A - Repair of defects in patterned thin film layers - Google Patents

Repair of defects in patterned thin film layers

Info

Publication number
GB1345093A
GB1345093A GB4496972A GB4496972A GB1345093A GB 1345093 A GB1345093 A GB 1345093A GB 4496972 A GB4496972 A GB 4496972A GB 4496972 A GB4496972 A GB 4496972A GB 1345093 A GB1345093 A GB 1345093A
Authority
GB
United Kingdom
Prior art keywords
repair
defects
thin film
film layers
patterned thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4496972A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RCA Corp
Original Assignee
RCA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RCA Corp filed Critical RCA Corp
Publication of GB1345093A publication Critical patent/GB1345093A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
GB4496972A 1971-10-08 1972-09-29 Repair of defects in patterned thin film layers Expired GB1345093A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US18773971A 1971-10-08 1971-10-08

Publications (1)

Publication Number Publication Date
GB1345093A true GB1345093A (en) 1974-01-30

Family

ID=22690259

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4496972A Expired GB1345093A (en) 1971-10-08 1972-09-29 Repair of defects in patterned thin film layers

Country Status (4)

Country Link
JP (1) JPS4847284A (https=)
DE (1) DE2247368A1 (https=)
GB (1) GB1345093A (https=)
IT (1) IT967781B (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5632777B2 (https=) * 1974-05-10 1981-07-30
JPS56128946A (en) * 1980-03-14 1981-10-08 Fujitsu Ltd Photomask correcting method
JPS599942A (ja) * 1982-07-08 1984-01-19 Mitsubishi Electric Corp 配線パタ−ン形成法

Also Published As

Publication number Publication date
JPS4847284A (https=) 1973-07-05
IT967781B (it) 1974-03-11
DE2247368A1 (de) 1973-04-12

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees