JPS4845302A - - Google Patents
Info
- Publication number
- JPS4845302A JPS4845302A JP8001071A JP8001071A JPS4845302A JP S4845302 A JPS4845302 A JP S4845302A JP 8001071 A JP8001071 A JP 8001071A JP 8001071 A JP8001071 A JP 8001071A JP S4845302 A JPS4845302 A JP S4845302A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8001071A JPS5139121B2 (en:Method) | 1971-10-11 | 1971-10-11 | |
| US00294797A US3843394A (en) | 1971-10-11 | 1972-10-04 | Photosensitive member |
| DE2249825A DE2249825A1 (de) | 1971-10-11 | 1972-10-11 | Fotoempfindliches element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8001071A JPS5139121B2 (en:Method) | 1971-10-11 | 1971-10-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4845302A true JPS4845302A (en:Method) | 1973-06-28 |
| JPS5139121B2 JPS5139121B2 (en:Method) | 1976-10-26 |
Family
ID=13706341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8001071A Expired JPS5139121B2 (en:Method) | 1971-10-11 | 1971-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5139121B2 (en:Method) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4865928A (en:Method) * | 1971-12-08 | 1973-09-10 | ||
| JPS4865927A (en:Method) * | 1971-12-08 | 1973-09-10 | ||
| JPS5028327A (en:Method) * | 1973-07-12 | 1975-03-22 | ||
| JPS51136286A (en) * | 1975-05-21 | 1976-11-25 | Nippon Telegr & Teleph Corp <Ntt> | Ion implantation using noncrystalline carchogenide thin film as mask |
| JPS51136288A (en) * | 1975-05-21 | 1976-11-25 | Nippon Telegr & Teleph Corp <Ntt> | Photo etching using non-crystalline carchogenide glass thin film |
| JPS51136287A (en) * | 1975-05-21 | 1976-11-25 | Nippon Telegr & Teleph Corp <Ntt> | Photo mask using non-crystalline carchognide glass thin film |
| JPS52111381A (en) * | 1976-03-15 | 1977-09-19 | Nippon Telegr & Teleph Corp <Ntt> | Photo-sensitive material for forming pattern having photo-sensitive ca lcogenide layer and the pattern forming method |
-
1971
- 1971-10-11 JP JP8001071A patent/JPS5139121B2/ja not_active Expired
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4865928A (en:Method) * | 1971-12-08 | 1973-09-10 | ||
| JPS4865927A (en:Method) * | 1971-12-08 | 1973-09-10 | ||
| JPS5028327A (en:Method) * | 1973-07-12 | 1975-03-22 | ||
| JPS51136286A (en) * | 1975-05-21 | 1976-11-25 | Nippon Telegr & Teleph Corp <Ntt> | Ion implantation using noncrystalline carchogenide thin film as mask |
| JPS51136288A (en) * | 1975-05-21 | 1976-11-25 | Nippon Telegr & Teleph Corp <Ntt> | Photo etching using non-crystalline carchogenide glass thin film |
| JPS51136287A (en) * | 1975-05-21 | 1976-11-25 | Nippon Telegr & Teleph Corp <Ntt> | Photo mask using non-crystalline carchognide glass thin film |
| JPS52111381A (en) * | 1976-03-15 | 1977-09-19 | Nippon Telegr & Teleph Corp <Ntt> | Photo-sensitive material for forming pattern having photo-sensitive ca lcogenide layer and the pattern forming method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5139121B2 (en:Method) | 1976-10-26 |