JPS4845178A - - Google Patents
Info
- Publication number
- JPS4845178A JPS4845178A JP7476671A JP7476671A JPS4845178A JP S4845178 A JPS4845178 A JP S4845178A JP 7476671 A JP7476671 A JP 7476671A JP 7476671 A JP7476671 A JP 7476671A JP S4845178 A JPS4845178 A JP S4845178A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7476671A JPS4845178A (enrdf_load_stackoverflow) | 1971-09-23 | 1971-09-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7476671A JPS4845178A (enrdf_load_stackoverflow) | 1971-09-23 | 1971-09-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4845178A true JPS4845178A (enrdf_load_stackoverflow) | 1973-06-28 |
Family
ID=13556715
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7476671A Pending JPS4845178A (enrdf_load_stackoverflow) | 1971-09-23 | 1971-09-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4845178A (enrdf_load_stackoverflow) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5457867A (en) * | 1977-10-17 | 1979-05-10 | Nichiden Varian Kk | Vacuum processor with automatic wafer feeder |
| JPS57112030A (en) * | 1980-12-29 | 1982-07-12 | Fujitsu Ltd | Jig assembly for surface treatment |
| JPS57159029A (en) * | 1981-03-25 | 1982-10-01 | Seiichiro Sogo | Oxidized film etching device for semiconductor wafer |
| JPS58210170A (ja) * | 1982-06-01 | 1983-12-07 | Seiichiro Sogo | 金属薄膜または酸化膜のエツチング装置 |
| JP2002520850A (ja) * | 1998-07-09 | 2002-07-09 | エーシーエム リサーチ，インコーポレイティド | 半導体デバイス上の金属相互接続を電解研磨する方法及び装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4428387Y1 (enrdf_load_stackoverflow) * | 1966-10-19 | 1969-11-25 |
-
1971
- 1971-09-23 JP JP7476671A patent/JPS4845178A/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4428387Y1 (enrdf_load_stackoverflow) * | 1966-10-19 | 1969-11-25 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5457867A (en) * | 1977-10-17 | 1979-05-10 | Nichiden Varian Kk | Vacuum processor with automatic wafer feeder |
| JPS57112030A (en) * | 1980-12-29 | 1982-07-12 | Fujitsu Ltd | Jig assembly for surface treatment |
| JPS57159029A (en) * | 1981-03-25 | 1982-10-01 | Seiichiro Sogo | Oxidized film etching device for semiconductor wafer |
| JPS58210170A (ja) * | 1982-06-01 | 1983-12-07 | Seiichiro Sogo | 金属薄膜または酸化膜のエツチング装置 |
| JP2002520850A (ja) * | 1998-07-09 | 2002-07-09 | エーシーエム リサーチ，インコーポレイティド | 半導体デバイス上の金属相互接続を電解研磨する方法及び装置 |