JPS4843261A - - Google Patents
Info
- Publication number
- JPS4843261A JPS4843261A JP47096977A JP9697772A JPS4843261A JP S4843261 A JPS4843261 A JP S4843261A JP 47096977 A JP47096977 A JP 47096977A JP 9697772 A JP9697772 A JP 9697772A JP S4843261 A JPS4843261 A JP S4843261A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2149108A DE2149108C3 (en) | 1971-09-28 | 1971-09-28 | Device for adjusting the magnification of an electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4843261A true JPS4843261A (en) | 1973-06-22 |
Family
ID=5821228
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47096977A Pending JPS4843261A (en) | 1971-09-28 | 1972-09-27 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3757117A (en) |
| JP (1) | JPS4843261A (en) |
| DE (1) | DE2149108C3 (en) |
| GB (1) | GB1394102A (en) |
| NL (1) | NL7209350A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5354465A (en) * | 1976-10-28 | 1978-05-17 | Jeol Ltd | Lens control circuit for electromicroscope or the like |
| JPS5451951U (en) * | 1977-09-16 | 1979-04-10 | ||
| JPS54107646U (en) * | 1978-01-17 | 1979-07-28 | ||
| US4839120A (en) * | 1987-02-24 | 1989-06-13 | Ngk Insulators, Ltd. | Ceramic material extruding method and apparatus therefor |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57212754A (en) * | 1981-06-24 | 1982-12-27 | Hitachi Ltd | Electron-beam controller for electron microscope |
| JPS5814460A (en) * | 1981-07-17 | 1983-01-27 | Internatl Precision Inc | Focus adjustment of electron microscope and photographing method and device to which said focus adjustment is applied |
| US4818873A (en) * | 1987-10-30 | 1989-04-04 | Vickers Instruments (Canada) Inc. | Apparatus for automatically controlling the magnification factor of a scanning electron microscope |
| JP2673900B2 (en) * | 1988-12-05 | 1997-11-05 | 株式会社日立製作所 | electronic microscope |
| JP4727777B2 (en) * | 1999-05-24 | 2011-07-20 | 株式会社日立製作所 | Measuring method by scanning electron microscope |
-
1971
- 1971-09-28 DE DE2149108A patent/DE2149108C3/en not_active Expired
-
1972
- 1972-07-04 NL NL7209350A patent/NL7209350A/xx not_active Application Discontinuation
- 1972-07-17 GB GB3330572A patent/GB1394102A/en not_active Expired
- 1972-09-15 US US00289531A patent/US3757117A/en not_active Expired - Lifetime
- 1972-09-27 JP JP47096977A patent/JPS4843261A/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5354465A (en) * | 1976-10-28 | 1978-05-17 | Jeol Ltd | Lens control circuit for electromicroscope or the like |
| JPS5451951U (en) * | 1977-09-16 | 1979-04-10 | ||
| JPS563125Y2 (en) * | 1977-09-16 | 1981-01-23 | ||
| JPS54107646U (en) * | 1978-01-17 | 1979-07-28 | ||
| US4839120A (en) * | 1987-02-24 | 1989-06-13 | Ngk Insulators, Ltd. | Ceramic material extruding method and apparatus therefor |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2149108B2 (en) | 1974-10-03 |
| DE2149108C3 (en) | 1975-05-15 |
| DE2149108A1 (en) | 1973-04-05 |
| US3757117A (en) | 1973-09-04 |
| NL7209350A (en) | 1973-03-30 |
| GB1394102A (en) | 1975-05-14 |