JPS4832781A - - Google Patents
Info
- Publication number
- JPS4832781A JPS4832781A JP6820271A JP6820271A JPS4832781A JP S4832781 A JPS4832781 A JP S4832781A JP 6820271 A JP6820271 A JP 6820271A JP 6820271 A JP6820271 A JP 6820271A JP S4832781 A JPS4832781 A JP S4832781A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6820271A JPS4832781A (nl) | 1971-09-02 | 1971-09-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6820271A JPS4832781A (nl) | 1971-09-02 | 1971-09-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4832781A true JPS4832781A (nl) | 1973-05-02 |
Family
ID=13366957
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6820271A Pending JPS4832781A (nl) | 1971-09-02 | 1971-09-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4832781A (nl) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51124193A (en) * | 1975-04-22 | 1976-10-29 | Toyobo Co Ltd | A method for preparing a polyester |
| DE2626827A1 (de) * | 1976-06-15 | 1977-12-29 | Bayer Ag | Stabilisierung von polyaethylenterephthalaten |
| JPS57165424A (en) * | 1981-03-20 | 1982-10-12 | Goodyear Tire & Rubber | Highly transparent colorless polyester |
| JPS5993723A (ja) * | 1982-11-22 | 1984-05-30 | Teijin Ltd | ポリエステルの製造法 |
| JP2021529996A (ja) * | 2018-07-06 | 2021-11-04 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 極紫外線マスクブランクの欠陥の低減 |
| US11542595B2 (en) | 2019-03-01 | 2023-01-03 | Applied Materials, Inc. | Physical vapor deposition system and processes |
-
1971
- 1971-09-02 JP JP6820271A patent/JPS4832781A/ja active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51124193A (en) * | 1975-04-22 | 1976-10-29 | Toyobo Co Ltd | A method for preparing a polyester |
| JPS555533B2 (nl) * | 1975-04-22 | 1980-02-07 | ||
| DE2626827A1 (de) * | 1976-06-15 | 1977-12-29 | Bayer Ag | Stabilisierung von polyaethylenterephthalaten |
| DE2626827C2 (de) * | 1976-06-15 | 1986-07-31 | Bayer Ag, 5090 Leverkusen | Stabilisierung von Polyethylenterephthalaten |
| JPS57165424A (en) * | 1981-03-20 | 1982-10-12 | Goodyear Tire & Rubber | Highly transparent colorless polyester |
| JPS5993723A (ja) * | 1982-11-22 | 1984-05-30 | Teijin Ltd | ポリエステルの製造法 |
| JP2021529996A (ja) * | 2018-07-06 | 2021-11-04 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 極紫外線マスクブランクの欠陥の低減 |
| US11275300B2 (en) | 2018-07-06 | 2022-03-15 | Applied Materials Inc. | Extreme ultraviolet mask blank defect reduction |
| US11542595B2 (en) | 2019-03-01 | 2023-01-03 | Applied Materials, Inc. | Physical vapor deposition system and processes |