JPS4828174B1 - - Google Patents

Info

Publication number
JPS4828174B1
JPS4828174B1 JP45067031A JP6703170A JPS4828174B1 JP S4828174 B1 JPS4828174 B1 JP S4828174B1 JP 45067031 A JP45067031 A JP 45067031A JP 6703170 A JP6703170 A JP 6703170A JP S4828174 B1 JPS4828174 B1 JP S4828174B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP45067031A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4828174B1 publication Critical patent/JPS4828174B1/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
  • Tunnel Furnaces (AREA)
JP45067031A 1969-08-01 1970-08-01 Pending JPS4828174B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US84685569A 1969-08-01 1969-08-01

Publications (1)

Publication Number Publication Date
JPS4828174B1 true JPS4828174B1 (ja) 1973-08-30

Family

ID=25299127

Family Applications (1)

Application Number Title Priority Date Filing Date
JP45067031A Pending JPS4828174B1 (ja) 1969-08-01 1970-08-01

Country Status (4)

Country Link
US (1) US3638927A (ja)
JP (1) JPS4828174B1 (ja)
CA (1) CA937492A (ja)
GB (1) GB1298090A (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1502754A (en) * 1975-12-22 1978-03-01 Siemens Ag Heat-treatment of semi-conductor wafers
US4098223A (en) * 1976-05-03 1978-07-04 Siemens Aktiengesellschaft Apparatus for heat treating semiconductor wafers
CA1249735A (en) * 1985-12-12 1989-02-07 Jacques Dufresne Load gear, sprocket and coupling
US5385074A (en) * 1993-02-23 1995-01-31 Cavendish Farms Limited Apparatus and method for cutting helically shaped potato pieces
CN101225462B (zh) * 2007-01-19 2010-08-11 蒋斐祥 汽车轮毂连续式热处理炉

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2338055A (en) * 1942-04-16 1943-12-28 Continental Can Co Conveyer organization for can end drying machines
US2391339A (en) * 1942-04-20 1945-12-18 Continental Can Co Air heater and circulator for can end drying machines
US3507382A (en) * 1968-03-08 1970-04-21 Texas Instruments Inc Semiconductor slice storage and conveyor system
US3469831A (en) * 1968-07-17 1969-09-30 Jack Beavers Heat treatment furnace

Also Published As

Publication number Publication date
US3638927A (en) 1972-02-01
GB1298090A (en) 1972-11-29
CA937492A (en) 1973-11-27

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