CA937492A - Slice conveyor furnace - Google Patents

Slice conveyor furnace

Info

Publication number
CA937492A
CA937492A CA089723A CA89723A CA937492A CA 937492 A CA937492 A CA 937492A CA 089723 A CA089723 A CA 089723A CA 89723 A CA89723 A CA 89723A CA 937492 A CA937492 A CA 937492A
Authority
CA
Canada
Prior art keywords
conveyor furnace
slice conveyor
slice
furnace
conveyor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA089723A
Other languages
English (en)
Inventor
O. Wells Wallace
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Application granted granted Critical
Publication of CA937492A publication Critical patent/CA937492A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
  • Tunnel Furnaces (AREA)
CA089723A 1969-08-01 1970-07-31 Slice conveyor furnace Expired CA937492A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US84685569A 1969-08-01 1969-08-01

Publications (1)

Publication Number Publication Date
CA937492A true CA937492A (en) 1973-11-27

Family

ID=25299127

Family Applications (1)

Application Number Title Priority Date Filing Date
CA089723A Expired CA937492A (en) 1969-08-01 1970-07-31 Slice conveyor furnace

Country Status (4)

Country Link
US (1) US3638927A (ja)
JP (1) JPS4828174B1 (ja)
CA (1) CA937492A (ja)
GB (1) GB1298090A (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1502754A (en) * 1975-12-22 1978-03-01 Siemens Ag Heat-treatment of semi-conductor wafers
US4098223A (en) * 1976-05-03 1978-07-04 Siemens Aktiengesellschaft Apparatus for heat treating semiconductor wafers
CA1249735A (en) * 1985-12-12 1989-02-07 Jacques Dufresne Load gear, sprocket and coupling
US5385074A (en) * 1993-02-23 1995-01-31 Cavendish Farms Limited Apparatus and method for cutting helically shaped potato pieces
CN101225462B (zh) * 2007-01-19 2010-08-11 蒋斐祥 汽车轮毂连续式热处理炉

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2338055A (en) * 1942-04-16 1943-12-28 Continental Can Co Conveyer organization for can end drying machines
US2391339A (en) * 1942-04-20 1945-12-18 Continental Can Co Air heater and circulator for can end drying machines
US3507382A (en) * 1968-03-08 1970-04-21 Texas Instruments Inc Semiconductor slice storage and conveyor system
US3469831A (en) * 1968-07-17 1969-09-30 Jack Beavers Heat treatment furnace

Also Published As

Publication number Publication date
US3638927A (en) 1972-02-01
JPS4828174B1 (ja) 1973-08-30
GB1298090A (en) 1972-11-29

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